TALK=T;RUN(1,1)
PHOTON USE
p;;;;
up -x
set con fi dep 4
vec z 1 sh
t
2
Figure 1. Velocity Vectors.
.6E+02 .299E+04 CR
pause
vec cl;te cl;redr
con tem1 z 1 fill
te
2
Figure 2. Temperature Contours (K).
.6E+02 .299E+04 CR
pause
cl;text
2
LAMP HEATER
.80874E+03 .29346E+04 C
WAFER
.88921E+03 .13181E+04 C
inlet
.94956E+03 .27209E+04 C
outlet1
.14485E+03 .43938E+03 C
outlet2
.16497E+04 .44341E+03 C
Figure 3. Reactor Geometry.
.6E+02 .299E+04 CR
use patgeo
msg
msg Press e to END
ENDUSE
DISPLAY
This case simulates a Single Wafer Chemical
Vapour Deposition Reactor described below.
| INLET FLOW |********************|
C| PLUG PROFILE |********************|
E|||||||||||||||||||||********************|
N|VVVVVVVVVVVVVVVVVVV|***** BLOCKAGE *****|W
T| |********************|A
R| | |********************|L
E| V | _________________|L
| |**| |
L| |**| |
I| |**| |
N| |__| | -->y
E| | | |
| V | v
| --> --> | z
|_________________________ | |
|*************************|_______ V |
|*********************************| | |
|************BLOCKAGE ************| V |
|*********************************|OUTLET|
ENDDIS
PHOTON USE
p
up -x
set con fi dep 4
vec z 1 sh
t
2
Figure 1. Velocity Vectors.
.6E+02 .299E+04 CR
pause
vec cl;te cl;redr
con tem1 z 1 fill
te
2
Figure 2. Temperature Contours (K).
.6E+02 .299E+04 CR
pause
cl;text
2
LAMP HEATER
.80874E+03 .29346E+04 C
WAFER
.88921E+03 .13181E+04 C
inlet
.94956E+03 .27209E+04 C
outlet1
.14485E+03 .43938E+03 C
outlet2
.16497E+04 .44341E+03 C
Figure 3. Reactor Geometry.
.6E+02 .299E+04 CR
use patgeo
pause
ENDUSE
************************************************************
Group 1. Run Title and Number
************************************************************
************************************************************
TEXT(CVD REACTOR RADIATION EXAMPLE : R100 )
************************************************************
************************************************************
IRUNN = 1 ;LIBREF = 2
************************************************************
Group 2. Time dependence
STEADY = T
************************************************************
Group 3. X-Direction Grid Spacing
CARTES = T
NX = 14
XULAST =0.24
XFRAC(1)=0.113402 ;XFRAC(2)=0.303264
XFRAC(3)=0.416667 ;XFRAC(4)=0.479167
XFRAC(5)=0.508629 ;XFRAC(6)=0.5625
XFRAC(7)=0.616371 ;XFRAC(8)=0.645833
XFRAC(9)=0.666667 ;XFRAC(10)=0.696481
XFRAC(11)=0.750994 ;XFRAC(12)=0.821586
XFRAC(13)=0.905181 ;XFRAC(14)=1.
************************************************************
Group 4. Y-Direction Grid Spacing
NY = 32
YVLAST =0.17
YFRAC(1)=0.020797 ;YFRAC(2)=0.058824
YFRAC(3)=0.09685 ;YFRAC(4)=0.117647
YFRAC(5)=0.141662 ;YFRAC(6)=0.181868
YFRAC(7)=0.205882 ;YFRAC(8)=0.235294
YFRAC(9)=0.252941 ;YFRAC(10)=0.280413
YFRAC(11)=0.316055 ;YFRAC(12)=0.355609
YFRAC(13)=0.397332 ;YFRAC(14)=0.436886
YFRAC(15)=0.472528 ;YFRAC(16)=0.5
YFRAC(17)=0.527472 ;YFRAC(18)=0.563114
YFRAC(19)=0.602668 ;YFRAC(20)=0.644391
YFRAC(21)=0.683945 ;YFRAC(22)=0.719587
YFRAC(23)=0.747059 ;YFRAC(24)=0.764706
YFRAC(25)=0.794118 ;YFRAC(26)=0.818132
YFRAC(27)=0.858338 ;YFRAC(28)=0.882353
YFRAC(29)=0.90315 ;YFRAC(30)=0.941177
YFRAC(31)=0.979203 ;YFRAC(32)=1.
************************************************************
Group 5. Z-Direction Grid Spacing
PARAB = F
NZ = 1
ZWLAST =0.132
ZFRAC(1)=1.
************************************************************
Group 6. Body-Fitted Coordinates
************************************************************
Group 7. Variables: STOREd,SOLVEd,NAMEd
ONEPHS = T
NAME(1)=P1 ;NAME(3)=U1
NAME(5)=V1 ;NAME(143)=TEM1
NAME(144)=PRPS ;NAME(145)=SPH1
NAME(146)=KOND ;NAME(147)=ENUL
NAME(148)=DEN1 ;NAME(149)=SCAT
NAME(150)=EMIS
* Y in SOLUTN argument list denotes:
* 1-stored 2-solved 3-whole-field
* 4-point-by-point 5-explicit 6-harmonic averaging
SOLUTN(P1,Y,Y,Y,N,N,Y)
SOLUTN(U1,Y,Y,N,N,N,Y)
SOLUTN(V1,Y,Y,N,N,N,Y)
SOLUTN(TEM1,Y,Y,Y,N,N,Y)
SOLUTN(PRPS,Y,N,N,N,N,Y)
SOLUTN(SPH1,Y,N,N,N,N,Y)
SOLUTN(KOND,Y,N,N,N,N,Y)
SOLUTN(ENUL,Y,N,N,N,N,Y)
SOLUTN(DEN1,Y,N,N,N,N,Y)
SOLUTN(SCAT,Y,N,N,N,N,Y)
SOLUTN(EMIS,Y,N,N,N,N,Y)
DEN1 = 148
VISL = 147
PRPS = 144
************************************************************
Group 8. Terms & Devices
* Y in TERMS argument list denotes:
* 1-built-in source 2-convection 3-diffusion 4-transient
* 5-first phase variable 6-interphase transport
TERMS(P1,Y,Y,Y,N,Y,Y)
TERMS(U1,Y,Y,Y,Y,Y,Y)
TERMS(V1,Y,Y,Y,Y,Y,Y)
TERMS(TEM1,N,Y,Y,Y,N,Y)
DIFCUT =0.5 ;ZDIFAC =1.
GALA = F ;ADDDIF = F
ISOLX = -1 ;ISOLY = -1 ;ISOLZ = -1
************************************************************
Group 9. Properties used if PRPS is not
stored, and where PRPS = -1.0 if it is!
RHO1 =1. ;TMP1 =0. ;EL1 =0.
TSURR =0. ;TEMP0 =0. ;PRESS0 =1.0E+05
DVO1DT =0. ;DRH1DP =0.
EMISS =0. ;SCATT =0.
RADIA =0. ;RADIB =0.
ENUL =1.0E-05 ;ENUT =0.
PRNDTL(U1)=1. ;PRNDTL(V1)=1.
PRNDTL(TEM1)=1.
PRT(U1)=1. ;PRT(V1)=1.
PRT(TEM1)=1.
CP1 =1. ;CP2 =1.
************************************************************
Group 10.Inter-Phase Transfer Processes
************************************************************
Group 11.Initial field variables (PHIs)
FIINIT(P1)=1.0E-10 ;FIINIT(U1)=1.0E-10
FIINIT(V1)=1.0E-10 ;FIINIT(TEM1)=1.0E-10
FIINIT(PRPS)=0. ;FIINIT(SPH1)=1.0E-10
FIINIT(KOND)=1.0E-10 ;FIINIT(ENUL)=1.0E-10
FIINIT(DEN1)=1.0E-10 ;FIINIT(SCAT)=0.
FIINIT(EMIS)=0.
PATCH(TOPL1 ,INIVAL, 1, 3, 1, 9, 1, 1, 1, 1)
INIT(TOPL1 ,PRPS,0. ,198. )
PATCH(TOPS1 ,INIVAL, 4, 4, 9, 9, 1, 1, 1, 1)
INIT(TOPS1 ,PRPS,0. ,198. )
PATCH(TOPL2 ,INIVAL, 1, 3, 24, 32, 1, 1, 1, 1)
INIT(TOPL2 ,PRPS,0. ,198. )
PATCH(TOPS2 ,INIVAL, 4, 4, 24, 24, 1, 1, 1, 1)
INIT(TOPS2 ,PRPS,0. ,198. )
PATCH(BOTL ,INIVAL, 10, 14, 5, 28, 1, 1, 1, 1)
INIT(BOTL ,PRPS,0. ,198. )
PATCH(BOTS ,INIVAL, 9, 9, 8, 25, 1, 1, 1, 1)
INIT(BOTS ,PRPS,0. ,198. )
INIADD = F
FSWEEP = 1
NAMFI =CHAM
************************************************************
Group 12. Patchwise adjustment of terms
Patches for this group are printed with those
for Group 13.
Their names begin either with GP12 or &
************************************************************
Group 13. Boundary & Special Sources
PATCH(PLUG ,WEST , 1, 1, 10, 23, 1, 1, 1, 1)
COVAL(PLUG ,P1 , FIXFLU ,0.01189 )
COVAL(PLUG ,U1 ,0. ,1.0E-02 )
COVAL(PLUG ,V1 ,0. ,0. )
COVAL(PLUG ,TEM1,0. ,300. )
PATCH(EXTP1 ,EAST , 14, 14, 1, 4, 1, 1, 1, 1)
COVAL(EXTP1 ,P1 ,1000. ,0. )
PATCH(EXTP2 ,EAST , 14, 14, 29, 32, 1, 1, 1, 1)
COVAL(EXTP2 ,P1 ,1000. ,0. )
PATCH(WAFCON ,EAST , 8, 8, 8, 25, 1, 1, 1, 1)
PATCH(SIDE1 ,NWALL , 4, 14, 32, 32, 1, 1, 1, 1)
COVAL(SIDE1 ,U1 ,1. ,0. )
PATCH(SIDE2 ,SWALL , 4, 14, 1, 1, 1, 1, 1, 1)
COVAL(SIDE2 ,U1 ,1. ,0. )
PATCH(@RI001 ,WEST , 1, 1, 10, 23, 1, 1, 1, 1)
COVAL(@RI001 ,TEM1,0. ,300. )
PATCH(@RI002 ,NORTH , 1, 3, 23, 23, 1, 1, 1, 1)
COVAL(@RI002 ,TEM1, GRND1 ,0. )
PATCH(@RI003 ,NORTH , 4, 4, 23, 23, 1, 1, 1, 1)
COVAL(@RI003 ,TEM1, GRND1 ,0. )
PATCH(@RI004 ,WEST , 5, 5, 24, 24, 1, 1, 1, 1)
COVAL(@RI004 ,TEM1, GRND1 ,0. )
PATCH(@RI005 ,SOUTH , 4, 4, 25, 25, 1, 1, 1, 1)
COVAL(@RI005 ,TEM1, GRND1 ,0. )
PATCH(@RI006 ,WEST , 4, 4, 25, 32, 1, 1, 1, 1)
COVAL(@RI006 ,TEM1, GRND1 ,0. )
PATCH(@RI007 ,NORTH , 4, 8, 32, 32, 1, 1, 1, 1)
COVAL(@RI007 ,TEM1, GRND1 ,0. )
PATCH(@RI008 ,NORTH , 9, 9, 32, 32, 1, 1, 1, 1)
COVAL(@RI008 ,TEM1, GRND1 ,0. )
PATCH(@RI009 ,NORTH , 10, 14, 32, 32, 1, 1, 1, 1)
COVAL(@RI009 ,TEM1, GRND1 ,0. )
PATCH(@RI010 ,SOUTH , 10, 14, 29, 29, 1, 1, 1, 1)
COVAL(@RI010 ,TEM1, GRND1 ,0. )
PATCH(@RI011 ,EAST , 9, 9, 26, 28, 1, 1, 1, 1)
COVAL(@RI011 ,TEM1, GRND1 ,0. )
PATCH(@RI012 ,SOUTH , 9, 9, 26, 26, 1, 1, 1, 1)
COVAL(@RI012 ,TEM1, GRND1 ,0. )
PATCH(@RI013 ,SOUTH , 1, 3, 10, 10, 1, 1, 1, 1)
COVAL(@RI013 ,TEM1, GRND1 ,0. )
PATCH(@RI014 ,SOUTH , 4, 4, 10, 10, 1, 1, 1, 1)
COVAL(@RI014 ,TEM1, GRND1 ,0. )
PATCH(@RI015 ,WEST , 5, 5, 9, 9, 1, 1, 1, 1)
COVAL(@RI015 ,TEM1, GRND1 ,0. )
PATCH(@RI016 ,NORTH , 4, 4, 8, 8, 1, 1, 1, 1)
COVAL(@RI016 ,TEM1, GRND1 ,0. )
PATCH(@RI017 ,WEST , 4, 4, 1, 8, 1, 1, 1, 1)
COVAL(@RI017 ,TEM1, GRND1 ,0. )
PATCH(@RI018 ,SOUTH , 4, 8, 1, 1, 1, 1, 1, 1)
COVAL(@RI018 ,TEM1, GRND1 ,0. )
PATCH(@RI019 ,SOUTH , 9, 9, 1, 1, 1, 1, 1, 1)
COVAL(@RI019 ,TEM1, GRND1 ,0. )
PATCH(@RI020 ,SOUTH , 10, 14, 1, 1, 1, 1, 1, 1)
COVAL(@RI020 ,TEM1, GRND1 ,0. )
PATCH(@RI021 ,NORTH , 10, 14, 4, 4, 1, 1, 1, 1)
COVAL(@RI021 ,TEM1, GRND1 ,0. )
PATCH(@RI022 ,EAST , 9, 9, 5, 7, 1, 1, 1, 1)
COVAL(@RI022 ,TEM1, GRND1 ,0. )
PATCH(@RI023 ,NORTH , 9, 9, 7, 7, 1, 1, 1, 1)
COVAL(@RI023 ,TEM1, GRND1 ,0. )
PATCH(@RI024 ,EAST , 8, 8, 24, 25, 1, 1, 1, 1)
COVAL(@RI024 ,TEM1,0. ,500. )
PATCH(@RI025 ,EAST , 8, 8, 17, 23, 1, 1, 1, 1)
COVAL(@RI025 ,TEM1,0. ,500. )
PATCH(@RI026 ,EAST , 8, 8, 8, 9, 1, 1, 1, 1)
COVAL(@RI026 ,TEM1,0. ,500. )
PATCH(@RI027 ,EAST , 8, 8, 10, 16, 1, 1, 1, 1)
COVAL(@RI027 ,TEM1,0. ,500. )
PATCH(@RI028 ,EAST , 14, 14, 29, 32, 1, 1, 1, 1)
COVAL(@RI028 ,TEM1,0. ,300. )
PATCH(@RI029 ,EAST , 14, 14, 1, 4, 1, 1, 1, 1)
COVAL(@RI029 ,TEM1,0. ,300. )
XCYCLE = F
EGWF = T
WALLCO = GRND2
************************************************************
Group 14. Downstream Pressure For PARAB
************************************************************
Group 15. Terminate Sweeps
LSWEEP = 200 ;ISWC1 = 1
LITHYD = 1 ;LITFLX = 1 ;LITC = 1 ;ITHC1 = 1
SELREF = T
RESFAC =1.0E-05
************************************************************
Group 16. Terminate Iterations
LITER(P1)=20 ;LITER(U1)=10
LITER(V1)=10 ;LITER(TEM1)=20
ENDIT(P1)=1.0E-03 ;ENDIT(U1)=1.0E-03
ENDIT(V1)=1.0E-03 ;ENDIT(TEM1)=1.0E-03
************************************************************
Group 17. Relaxation
RELAX(P1,LINRLX,1.)
RELAX(U1,FALSDT,24.)
RELAX(V1,FALSDT,24.)
RELAX(TEM1,FALSDT,1.0E+09)
RELAX(PRPS,LINRLX,1.)
RELAX(SPH1,LINRLX,1.)
RELAX(KOND,LINRLX,1.)
RELAX(ENUL,LINRLX,1.)
RELAX(DEN1,LINRLX,1.)
RELAX(SCAT,LINRLX,1.)
RELAX(EMIS,LINRLX,1.)
OVRRLX =0.
EXPERT = F ;NNORSL = F
************************************************************
Group 18. Limits
VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-1.0E+10
VARMAX(U1)=1.0E+06 ;VARMIN(U1)=-1.0E+06
VARMAX(V1)=1.0E+06 ;VARMIN(V1)=-1.0E+06
VARMAX(TEM1)=1.0E+10 ;VARMIN(TEM1)=-1.0E+10
VARMAX(PRPS)=1.0E+10 ;VARMIN(PRPS)=-1.0E+10
VARMAX(SPH1)=1.0E+10 ;VARMIN(SPH1)=-1.0E+10
VARMAX(KOND)=1.0E+10 ;VARMIN(KOND)=-1.0E+10
VARMAX(ENUL)=1.0E+10 ;VARMIN(ENUL)=-1.0E+10
VARMAX(DEN1)=1.0E+10 ;VARMIN(DEN1)=-1.0E+10
VARMAX(SCAT)=1.0E+10 ;VARMIN(SCAT)=-1.0E+10
VARMAX(EMIS)=1.0E+10 ;VARMIN(EMIS)=-1.0E+10
************************************************************
Group 19. Data transmitted to GROUND
S2SR = T
PARSOL = F
ISG62 = 1
SPEDAT(SET,CVD,RADCVD,L,T)
SPEDAT(SET,GXMONI,PLOTALL,L,T)
SPEDAT(SET,MATERIAL,0,L,T)
SPEDAT(SET,MATERIAL,198,L,T)
************************************************************
Group 20. Preliminary Printout
************************************************************
Group 21. Print-out of Variables
INIFLD = F ;SUBWGR = F
* Y in OUTPUT argument list denotes:
* 1-field 2-correction-eq. monitor 3-selective dumping
* 4-whole-field residual 5-spot-value table 6-residual table
OUTPUT(P1,Y,N,Y,Y,Y,Y)
OUTPUT(U1,Y,N,Y,Y,Y,Y)
OUTPUT(V1,Y,N,Y,Y,Y,Y)
OUTPUT(TEM1,Y,N,Y,Y,Y,Y)
OUTPUT(PRPS,Y,N,Y,N,N,N)
OUTPUT(SPH1,Y,N,Y,N,N,N)
OUTPUT(KOND,Y,N,Y,N,N,N)
OUTPUT(ENUL,Y,N,Y,N,N,N)
OUTPUT(DEN1,Y,N,Y,N,N,N)
OUTPUT(SCAT,Y,N,Y,N,N,N)
OUTPUT(EMIS,Y,N,Y,N,N,N)
************************************************************
Group 22. Monitor Print-Out
IXMON = 8 ;IYMON = 32 ;IZMON = 36
NPRMON = 100000 ;NPRMNT = 1 ;TSTSWP = -1
UWATCH = T ;USTEER = T
HIGHLO = F
************************************************************
Group 23.Field Print-Out & Plot Control
NPRINT = 100000 ;NUMCLS = 5
NXPRIN = -1 ;IXPRF = 1 ;IXPRL = 10000
NYPRIN = -1 ;IYPRF = 1 ;IYPRL = 10000
IPLTF = 1 ;IPLTL = -1 ;NPLT = -1
ISWPRF = 1 ;ISWPRL = 100000
ITABL = 3 ;IPROF = 1
ABSIZ =0.5 ;ORSIZ =0.4
NTZPRF = 1 ;NCOLPF = 50
ICHR = 2 ;NCOLCO = 45 ;NROWCO = 20
No PATCHes yet used for this Group
************************************************************
Group 24. Dumps For Restarts
SAVE = T ;NOWIPE = F
NSAVE =CHAM
STOP