#$r002
 
  PHOTON USE
  p;;;;
 
  up -x
  set con fi dep 4
 
  vec z 1 sh
  t
  2
 
  Figure 1.  Velocity Vectors.
    .6E+02  .299E+04 CR
  pause
  vec cl;te cl;redr
  con tem1 z 1 fill
  te
  2
 
  Figure 2.  Temperature Contours (K).
    .6E+02  .299E+04 CR
  pause
  cl;text
  2
 
  LAMP HEATER
    .80874E+03  .29346E+04  C
  WAFER
    .88921E+03  .13181E+04  C
  inlet
    .94956E+03  .27209E+04  C
  outlet1
    .14485E+03  .43938E+03  C
  outlet2
    .16497E+04  .44341E+03  C
  Figure 3.  Reactor Geometry.
    .6E+02  .299E+04 CR
  use patgeo
  msg
  msg Press e to END
  ENDUSE
 
   GROUP 1. Run title and other preliminaries
TEXT(CVD REACTOR RADIATION EXAMPLE : R100
TITLE
  DISPLAY
    This case simulates a Single Wafer Chemical
    Vapour Deposition Reactor described below.
 
    |     INLET FLOW    |********************|
   C|    PLUG PROFILE   |********************|
   E|||||||||||||||||||||********************|
   N|VVVVVVVVVVVVVVVVVVV|***** BLOCKAGE *****|W
   T|                   |********************|A
   R|          |        |********************|L
   E|          V        |   _________________|L
    |                   |**|                 |
   L|                   |**|                 |
   I|                   |**|                 |
   N|                   |__|                 | -->y
   E|          |                             | |
    |          V                             | v
    |               -->       -->            | z
    |_________________________            |  |
    |*************************|_______    V  |
    |*********************************|   |  |
    |************BLOCKAGE ************|   V  |
    |*********************************|OUTLET|
  ENDDIS
 
REAL   (YR1,YR2,YR3,YR4,YR5,XR1,XR2,XR3,XR4,XR5)
INTEGER(NY1,NY2,NY3,NY4,NY5,NX1,NX2,NX3,NX4,NX5)
INTEGER(NY2A,NY3A,NY4A,NX2A,NX3A,NX4A,REFINX,REFINY)
REAL   (ZDTF,WVELIN,DUM1,RHOIN)
  ** Radiation settings
REAL(GWAFT,GTIN);GTIN=300.;GWAFT=500.
  For coarse or original grid set refine to 1.
  For fine grid set refine to 2/3/4...etc.
REFINX = 1
REFINY = 1
    GROUP 2. Transience; time-step specification
STEADY = T;PARAB = F;CARTES =T
    GROUP 3. X-direction grid specification
NZ     = 1;ZWLAST = .132
    GROUP 4. Y-direction grid specification
YR1    = 0.042;NY1 = 7*REFINY
YR2    = 0.003;NY2 = 1*REFINY
YR3    = 0.005;NY3 = 1*REFINY
YR4    = 0.015;NY4 = 3*REFINY
YR5    = 0.020;NY5 = 4*REFINY
NY     = 2*(NY1+NY2+NY3+NY4+NY5)
NY2A   = NY1 +NY2
NY3A   = NY2A+NY3
NY4A   = NY3A+NY4
NREGY  = 10
IREGY  = 1;GRDPWR(Y,-NY5,YR5,1.5)
IREGY  = 2;GRDPWR(Y,-NY4,YR4,1.5)
IREGY  = 3;GRDPWR(Y,-NY3,YR3,1.5)
IREGY  = 4;GRDPWR(Y, NY2,YR2,1.0)
IREGY  = 5;GRDPWR(Y,-NY1,YR1,1.2)
IREGY  = 6;GRDPWR(Y,-NY1,YR1,1.2)
IREGY  = 7;GRDPWR(Y, NY2,YR2,1.0)
IREGY  = 8;GRDPWR(Y,-NY3,YR3,1.5)
IREGY  = 9;GRDPWR(Y,-NY4,YR4,1.5)
IREGY  = 10;GRDPWR(Y,-NY5,YR5,1.5)
 
    GROUP 5. Z-direction grid specification
XR1    = 0.100;NX1 = 3*REFINX
XR2    = 0.015;NX2 = 1*REFINX
XR3    = 0.040;NX3 = 4*REFINX
XR4    = 0.005;NX4 = 1*REFINX
XR5    = 0.080;NX5 = 5*REFINX
NX     = NX1+NX2+NX3+NX4+NX5
NX2A   = NX1 +NX2
NX3A   = NX2A+NX3
NX4A   = NX3A+NX4
NREGX  = 5
IREGX  = 1;GRDPWR(X,-NX1,XR1,1.5)
IREGX  = 2;GRDPWR(X,-NX2,XR2,1.5)
IREGX  = 3;GRDPWR(X,-NX3,XR3,1.5)
IREGX  = 4;GRDPWR(X, NX4,XR4,1.0)
IREGX  = 5;GRDPWR(X, NX5,XR5,1.5)
LOAD($R333)