LOAD(D104)
      GROUP 1. Run title and other preliminaries
TEXT(Tungsten Reactor - showerhead inlet:D105
TITLE
  DISPLAY
    This file simulates a simple chemical vapour deposition
    reactor for depositing tungsten using a showerhead inlet
    to obtain uniform flow; the reactor is axisymmetric and
    the geometry was provided by Siemens.
    Laminar, steady-state flow is assumed.
    The susceptor temperature is 733K.
  ENDDIS
 
   ************************************************************
   *
   *  GROUP 11. Initialization of variable or porosity fields
   *
    ** Block off shower head area
CONPOR(BLK3,-1.0,CELL,1,NX, 1,17,12,12)
COVAL (BLK3,PRPS,0.0,111)
COVAL (BLK3,BLOK,0.0,3)
CONPOR(BLK4,-1.0,CELL,1,NX,12,17,13,13)
COVAL (BLK4,PRPS,0.0,111)
COVAL (BLK4,BLOK,0.0,3)
CONPOR(BLK5,-1.0,CELL,1,NX, 1,17,14,14)
COVAL (BLK5,PRPS,0.0,111)
COVAL (BLK5,BLOK,0.0,3)
CONPOR(BLK6,-1.0,CELL,1,NX,16,17,15,21)
COVAL (BLK6,PRPS,0.0,111)
COVAL (BLK6,BLOK,0.0,3)
   *
   ************************************************************
   *
   *  GROUP 13. Boundary conditions and special sources
   *
    * INLET Boundary Condition
INLET(INLET,LOW,1,1,1,11,13,13,1,LSTEP)
VALUE(INLET,TEM1,293.)
VALUE(INLET,P1,UAV*RHOIN)
VALUE(INLET,W1,UAV)
VALUE(INLET,S177,0.94)
VALUE(INLET,S80,0.06)
VALUE(INLET,S97,0.000)
 
    * Showerhead patch
PATCH(SHWR,HIGH,1,1,1,11,14,14,1,LSTEP)
COVAL(SHWR,P1,32000,GRND7)
COVAL(SHWR,W1,0.5,GRND7)
COVAL(SHWR,TEM1,ONLYMS,GRND7)
COVAL(SHWR,S177,ONLYMS,GRND7)
COVAL(SHWR,S80,ONLYMS,GRND7)
COVAL(SHWR,S97,ONLYMS,GRND7)
 
    * Radiation patches
    ** S2SR=T activates surface-to-surface radiation
S2SR=T
IF(S2SR) THEN
PATCH(@RI013,LOW,1,NX,1,11,14,14,1,LSTEP)
COVAL(@RI013,TEM1,GRND1,GRND1)
COVAL(@RI013,EMIS, 111 , 440.0 )
 
PATCH(@RI014,HIGH,1,NX,1,11,12,12,1,LSTEP)
COVAL(@RI014,TEM1,GRND1,GRND1)
COVAL(@RI014,EMIS, 111 , 293.0 )
 
PATCH(@RI015,SOUTH,1,NX,12,12,13,13,1,LSTEP)
COVAL(@RI015,TEM1,GRND1,GRND1)
COVAL(@RI015,EMIS, 111 , 293.0 )
ENDIF