TITLE:PHOENICS-CVD Example 1
BY: J R Heritage, CHAM Consultancy
DATE: 1996 PHOENICS Version: 2.2
PURPOSE OF CALCULATIONS:
To demonstrate the use of the CVD option in PHOENICS.
FLOW AND COMPUTATIONAL DETAILS
The geometry and velocity vectors are shown below:
Geometry and Velocity Vectors
The gas is heated directly by the wafer, which also loses heat to the cooled outer walls by radiation.
Si2H6 is involved in three gas-phase reactions, following the initial silane decomposition, and one surface reaction.
Si2H6 mass fraction
Si3H8 is created by a gas-phase reaction and then reacts at the wafer surface; note the depletion near the wafer.
Si3H8 mass fraction
H2 is involved in two gas-phase reactions, but is primarily produced on the wafer as it is created in all surface reactions.
H2 mass fraction