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PHOENICS-CVD USER GUIDE

Appendix 2; Sample Q1 Files

CHAM Technical Report TR/314

PHOENICS Version 2006

Document last revised 10/10/06

Contents

1. Inroduction

2. ASM Single-Wafer Reactor for Silicon Deposition

3. Tungsten Reactor

4. Parallel Plate Plasma Reactor


  1. Inroduction
  2. Three input 'q1' files are presented here. These have been constructed for the simulation of an ASM single-wafer reactor for silicon deposition, a tungsten reactor and a parallel plate plasma reactor, also for silicon deposition. All geometries are axisymmetric and laminar, steady-state conditions are assumed. Although these examples are based on real cases it should be noted that some of the parameters are selected for demonstration purposes. The 'q1' files are also provided in the code installation as library cases.


  3. ASM Single-Wafer Reactor for Silicon Deposition
  4. The inlet flow is 88.7% nitrogen and 11.3% silane by mass, at a temperature of 290K. The susceptor is held at a temperature of 900K and all outside walls are cooled to a temperature of 290K. Five gas-phase and five surface reactions are activated.

    <html><head><title>Q1</title>

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    TALK=T;RUN( 1, 1)

    ************************************************************

    Q1 created by VDI menu, Version 2006, Date 08/09/06

    CPVNAM=VDI;SPPNAM=CVD

    ************************************************************

    Echo DISPLAY / USE settings

    DISPLAY

    This q1 file simulates an ASM single wafer chemical vapour

    deposition reactor using Wilke diffusion; the reactor is

    axisymmetric and the geometry was provided by TU Delft.

    Laminar, steady-state flow is assumed.

    ENDDIS

    ************************************************************

    IRUNN = 1 ;LIBREF = 300

    ************************************************************

    Group 1. Run Title

    TEXT(ASM Single Wafer Si Reactor - Wilke:D300)

    ************************************************************

    Group 2. Transience

    STEADY = T

    ************************************************************

    Groups 3, 4, 5 Grid Information

    * Overall number of cells, RSET(M,NX,NY,NZ,tolerance)

    RSET(M,1,18,26,1.000000E-05)

    * Cylindrical-polar grid

    CARTES=F

    ************************************************************

    Group 6. Body-Fitted coordinates

    ************************************************************

    Group 7. Variables: STOREd,SOLVEd,NAMEd

    ONEPHS = T

    * Non-default variable names

    NAME( 16) =S116 ; NAME( 17) =S140

    NAME( 18) =S142 ; NAME( 19) =S145

    NAME( 20) =S158 ; NAME( 21) =S147

    NAME( 22) =S80 ; NAME(141) =ENUL

    NAME(142) =BLOK ; NAME(143) =PRPS

    NAME(144) =DEPO ; NAME(145) =SPHT

    NAME(146) =CNDT ; NAME(147) =EMIS

    NAME(148) =VPOR ; NAME(149) =RHO1

    NAME(150) =TEM1

    * Solved variables list

    SOLVE(P1 ,V1 ,W1 ,S140,S142,S145,S158,S147)

    SOLVE(S80 ,TEM1)

    * Stored variables list

    STORE(RHO1,VPOR,EMIS,CNDT,SPHT,DEPO,PRPS,BLOK)

    STORE(ENUL,S116)

    * Additional solver options

    SOLUTN(P1 ,Y,Y,Y,N,N,N)

    SOLUTN(S140,Y,Y,Y,N,N,Y)

    SOLUTN(S142,Y,Y,Y,N,N,Y)

    SOLUTN(S145,Y,Y,Y,N,N,Y)

    SOLUTN(S158,Y,Y,Y,N,N,Y)

    SOLUTN(S147,Y,Y,Y,N,N,Y)

    SOLUTN(S80 ,Y,Y,Y,N,N,Y)

    SOLUTN(TEM1,Y,Y,Y,N,N,Y)

    IVARBK = -1 ;ISOLBK = 1

    ************************************************************

    Group 8. Terms & Devices

    DIFCUT = 0.000000E+00

    NEWRH1 = T

    NEWENL = T

    UDIFNE = T

    USOURC = T

    ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0

    ************************************************************

    Group 9. Properties

    PRESS0 = 1.330000E+02

    * Domain material index is 70 signifying:

    * NOTSET

    SETPRPS(1, 70,Q1)

    ENUT = 0.000000E+00

    DVO1DT = 1.000000E+00

    PRNDTL(S140) = -GRND8 ;PRNDTL(S142) = -GRND8

    PRNDTL(S145) = -GRND8 ;PRNDTL(S158) = -GRND8

    PRNDTL(S147) = -GRND8 ;PRNDTL(S80 ) = -GRND8

    PRNDTL(TEM1) = -GRND8

    PRLH1A = 0.000000E+00 ;PRLH1B = 0.000000E+00

    PRLH1C = 0.000000E+00

    * List of user-defined materials to be read by EARTH

    MATFLG=T;IMAT=1

    * Name

    *Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.

    * <NOTSET>

    70 GRND8 GRND8 GRND8 GRND8 1.000

    * constants for GRND option no 1

    0.0 0.0 0.0

    * constants for GRND option no 2

    0.0 0.0 0.0

    * constants for GRND option no 3

    0.0 0.0 0.0

    * constants for GRND option no 4

    0.0 0.0 0.0

    ************************************************************

    Group 10.Inter-Phase Transfer Processes

    ************************************************************

    Group 11.Initialise Var/Porosity Fields

    FIINIT(P1 ) = 0.000000E+00 ;FIINIT(V1 ) = 0.000000E+00

    FIINIT(W1 ) = 0.000000E+00 ;FIINIT(S116) = 8.870000E-01

    FIINIT(S140) = 1.130000E-01 ;FIINIT(S142) = 1.001000E-10

    FIINIT(S145) = 1.001000E-10 ;FIINIT(S158) = 1.001000E-10

    FIINIT(S147) = 1.001000E-10 ;FIINIT(S80 ) = 1.001000E-10

    FIINIT(ENUL) = 1.001000E-10 ;FIINIT(BLOK) = 1.000000E+00

    FIINIT(PRPS) = -1.000000E+00 ;FIINIT(DEPO) = 1.001000E-10

    FIINIT(SPHT) = 1.001000E-10 ;FIINIT(CNDT) = 1.001000E-10

    FIINIT(EMIS) = 0.000000E+00 ;FIINIT(VPOR) = 1.000000E+00

    FIINIT(RHO1) = 1.001000E-10 ;FIINIT(TEM1) = 2.900000E+02

    No PATCHes used for this Group

    INIADD = F

    ************************************************************

    Group 12. Convection and diffusion adjustments

    No PATCHes used for this Group

    ************************************************************

    Group 13. Boundary & Special Sources

    PATCH (CHEM ,VOLUME,0,0,0,0,0,0,1,1)

    COVAL (CHEM ,S140, GRND1 , GRND1 )

    COVAL (CHEM ,S142, GRND1 , GRND1 )

    COVAL (CHEM ,S145, GRND1 , GRND1 )

    COVAL (CHEM ,S158, GRND1 , GRND1 )

    COVAL (CHEM ,S147, GRND1 , GRND1 )

    COVAL (CHEM ,S80 , GRND1 , GRND1 )

    COVAL (CHEM ,TEM1, GRND1 , GRND1 )

    PATCH (RELT ,PHASEM,0,0,0,0,0,0,1,1)

    COVAL (RELT ,S140, GRND1 , SAME )

    COVAL (RELT ,S142, GRND1 , SAME )

    COVAL (RELT ,S145, GRND1 , SAME )

    COVAL (RELT ,S158, GRND1 , SAME )

    COVAL (RELT ,S147, GRND1 , SAME )

    COVAL (RELT ,S80 , GRND1 , SAME )

    EGWF = T

    ************************************************************

    Group 14. Downstream Pressure For PARAB

    ************************************************************

    Group 15. Terminate Sweeps

    LSWEEP = 100

    RESFAC = 1.000000E-03

    ************************************************************

    Group 16. Terminate Iterations

    ************************************************************

    Group 17. Relaxation

    RELAX(P1 ,LINRLX, 1.000000E+00)

    RELAX(V1 ,FALSDT, 2.000000E-03)

    RELAX(W1 ,FALSDT, 2.000000E-03)

    RELAX(S140,FALSDT, 1.000000E+00)

    RELAX(S142,FALSDT, 1.000000E+00)

    RELAX(S145,FALSDT, 1.000000E+00)

    RELAX(S158,FALSDT, 1.000000E+00)

    RELAX(S147,FALSDT, 1.000000E+00)

    RELAX(S80 ,FALSDT, 1.000000E+00)

    RELAX(TEM1,LINRLX, 3.000000E-01)

    ************************************************************

    Group 18. Limits

    VARMAX(V1 ) = 1.000000E+06 ;VARMIN(V1 ) =-1.000000E+06

    VARMAX(W1 ) = 1.000000E+06 ;VARMIN(W1 ) =-1.000000E+06

    VARMAX(S116) = 1.000000E+00 ;VARMIN(S116) = 1.000000E-20

    VARMAX(S140) = 1.000000E+00 ;VARMIN(S140) = 1.000000E-20

    VARMAX(S142) = 1.000000E+00 ;VARMIN(S142) = 1.000000E-20

    VARMAX(S145) = 1.000000E+00 ;VARMIN(S145) = 1.000000E-20

    VARMAX(S158) = 1.000000E+00 ;VARMIN(S158) = 1.000000E-20

    VARMAX(S147) = 1.000000E+00 ;VARMIN(S147) = 1.000000E-20

    VARMAX(S80 ) = 1.000000E+00 ;VARMIN(S80 ) = 1.000000E-20

    VARMAX(TEM1) = 3.000000E+03 ;VARMIN(TEM1) = 2.600000E+02

    ************************************************************

    Group 19. EARTH Calls To GROUND Station

    USEGRD = T ;USEGRX = T

    NAMGRD =CVD

    S2SR = T

    ASAP = T

    PARSOL = T

    CSG10 ='q1'

    SPEDAT(SET,CVD,MCDOPT,I,2)

    SPEDAT(SET,CVD,BINOPT,I,4)

    SPEDAT(SET,CVD,MCPROP,I,3)

    SPEDAT(SET,CVD,CHMRLX,R,5.00000E-01)

    SPEDAT(SET,CVD,NGREAC,I,5)

    SPEDAT(SET,CVD,GREAC(1),I,6)

    SPEDAT(SET,CVD,GREAC(2),I,7)

    SPEDAT(SET,CVD,GREAC(3),I,16)

    SPEDAT(SET,CVD,GREAC(4),I,9)

    SPEDAT(SET,CVD,GREAC(5),I,10)

    SPEDAT(SET,CVD,NSREAC,I,5)

    SPEDAT(SET,CVD,SREAC(1),I,11)

    SPEDAT(SET,CVD,SREAC(2),I,12)

    SPEDAT(SET,CVD,SREAC(3),I,13)

    SPEDAT(SET,CVD,SREAC(4),I,14)

    SPEDAT(SET,CVD,SREAC(5),I,15)

    SPEDAT(SET,CVD,RADCVD,L,T)

    ************************************************************

    Group 20. Preliminary Printout

    ECHO = T

    ************************************************************

    Group 21. Print-out of Variables

    ************************************************************

    Group 22. Monitor Print-Out

    IXMON = 1 ;IYMON = 5 ;IZMON = 12

    NPRMON = 100000

    NPRMNT = 1

    TSTSWP = -1

    ************************************************************

    Group 23.Field Print-Out & Plot Control

    NPRINT = 100000

    ISWPRF = 1 ;ISWPRL = 100000

    No PATCHes used for this Group

    ************************************************************

    Group 24. Dumps For Restarts

    GVIEW(P,-1.000000E+00,0.000000E+00,0.000000E+00)

    GVIEW(UP,0.000000E+00,1.000000E+00,0.000000E+00)

    > DOM, SIZE, 1.000000E-02, 2.100000E-01, 3.400000E-01

    > DOM, MONIT, 0.000000E+00, 4.500000E-02, 1.809230E-01

    > DOM, SCALE, 1.000000E+00, 1.000000E+00, 1.000000E+00

    > DOM, SNAPSIZE, 1.000000E-02

    > GRID, BOUNDS, F F F F F F

    > GRID, RSET_X_1, 1, 1.000000E+00

    > GRID, RSET_Y_1, 10, 1.000000E+00

    > GRID, RSET_Y_2, 1, 1.000000E+00

    > GRID, RSET_Y_3, 1, 1.000000E+00

    > GRID, RSET_Y_4, 2, 1.000000E+00

    > GRID, RSET_Y_5, 4, 1.000000E+00

    > GRID, RSET_Z_1, 5, 1.000000E+00

    > GRID, RSET_Z_2, 2, 1.000000E+00

    > GRID, RSET_Z_3, 12,-1.200000E+00

    > GRID, RSET_Z_4, 1, 1.000000E+00

    > GRID, RSET_Z_5, 6,-9.000000E-01

    > OBJ, NAME, WAL1

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.350000E-01

    > OBJ, SIZE, 1.000000E-02, 1.200000E-01, 5.000010E-03

    > OBJ, GEOMETRY, polcu7

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)

    > OBJ, FIXED_TMP, 0.000000E+00, 9.000000E+02

    > OBJ, INI_BLOK, 2.000000E+00

    > OBJ, SUF_REAC_L, YES

    > OBJ, BATCH_F_L, 1.000000E+00

    > OBJ, NAME, WAL2

    > OBJ, POSITION, 0.000000E+00, 1.000000E-01, 0.000000E+00

    > OBJ, SIZE, 1.000000E-02, 1.100000E-01, 9.999999E-02

    > OBJ, GEOMETRY, polcu7

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 198,Solid with smooth-wall friction

    > OBJ, SURF_TEMP_S, 0.000000E+00, 2.900000E+02

    > OBJ, SURF_TEMP_H, 0.000000E+00, 2.900000E+02

    > OBJ, NAME, WAL3

    > OBJ, POSITION, 0.000000E+00, 1.000000E-01, 9.999999E-02

    > OBJ, SIZE, 1.000000E-02, 5.000003E-03, 4.000001E-02

    > OBJ, GEOMETRY, polcu8

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)

    > OBJ, INI_BLOK, 4.000000E+00

    > OBJ, NAME, WAL4

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.400000E-01

    > OBJ, SIZE, 1.000000E-02, 1.550000E-01, 9.999996E-02

    > OBJ, GEOMETRY, polcu7

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 198,Solid with smooth-wall friction

    > OBJ, SURF_TEMP_N, 0.000000E+00, 2.900000E+02

    > OBJ, NAME, INLET

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00

    > OBJ, SIZE, 1.000000E-02, 1.000000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcu5t

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, INLET

    > OBJ, DENSITY, 1.572000E-03

    > OBJ, VELOCITY, 0.000000E+00, 0.000000E+00, 1.345000E+00

    > OBJ, TEMPERATURE, 2.900000E+02

    > OBJ, INLET_S140, 1.130000E-01

    > OBJ, NAME, OUT

    > OBJ, POSITION, 0.000000E+00, 1.550000E-01, 3.400000E-01

    > OBJ, SIZE, 1.000000E-02, 5.500001E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcubet

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, OUTLET

    > OBJ, PRESSURE, 0.000000E+00

    > OBJ, TEMPERATURE, SAME

    > OBJ, COEFFICIENT, 1.000000E+03

    > OBJ, VELOCITY, 0.000000E+00, SAME , SAME

    > OBJ, OUTLET_S140, SAME

    > OBJ, OUTLET_S142, SAME

    > OBJ, OUTLET_S145, SAME

    > OBJ, OUTLET_S158, SAME

    > OBJ, OUTLET_S147, SAME

    > OBJ, OUTLET_S80, SAME

    > OBJ, NAME, DOME

    > OBJ, POSITION, 0.000000E+00, 1.200000E-01, 2.400000E-01

    > OBJ, SIZE, 1.000000E-02, 3.499999E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcu2

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, PLATE

    > OBJ, POROSITY, 0.000000E+00

    > OBJ, SIDE, LOW

    > OBJ, SURF_TEMP_L, 0.000000E+00, 2.900000E+02

    > OBJ, NAME, WAND2

    > OBJ, POSITION, 0.000000E+00, 2.100000E-01, 9.999999E-02

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 2.400000E-01

    > OBJ, GEOMETRY, polcu2

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, PLATE

    > OBJ, SURF_TEMP, 0.000000E+00, 2.900000E+02

    > OBJ, NAME, @RI001

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00

    > OBJ, SIZE, 1.000000E-02, 1.000000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI002

    > OBJ, POSITION, 0.000000E+00, 1.000000E-01, 0.000000E+00

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 9.999999E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI003

    > OBJ, POSITION, 0.000000E+00, 1.000000E-01, 9.999999E-02

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 4.000001E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.000000E+02

    > OBJ, NAME, @RI004

    > OBJ, POSITION, 0.000000E+00, 1.000000E-01, 1.400000E-01

    > OBJ, SIZE, 1.000000E-02, 5.000003E-03, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.000000E+02

    > OBJ, NAME, @RI005

    > OBJ, POSITION, 0.000000E+00, 1.050000E-01, 9.999999E-02

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 4.000001E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.000000E+02

    > OBJ, NAME, @RI006

    > OBJ, POSITION, 0.000000E+00, 1.050000E-01, 9.999999E-02

    > OBJ, SIZE, 1.000000E-02, 1.050000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI007

    > OBJ, POSITION, 0.000000E+00, 2.100000E-01, 9.999999E-02

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 2.400000E-01

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI008

    > OBJ, POSITION, 0.000000E+00, 1.550000E-01, 3.400000E-01

    > OBJ, SIZE, 1.000000E-02, 5.500001E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI009

    > OBJ, POSITION, 0.000000E+00, 1.550000E-01, 2.400000E-01

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 9.999996E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI010

    > OBJ, POSITION, 0.000000E+00, 1.200000E-01, 2.400000E-01

    > OBJ, SIZE, 1.000000E-02, 3.499999E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 2.900000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 2.900000E+02

    > OBJ, NAME, @RI011

    > OBJ, POSITION, 0.000000E+00, 1.200000E-01, 2.350000E-01

    > OBJ, SIZE, 1.000000E-02, 0.000000E+00, 5.000010E-03

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 9.000000E+02

    > OBJ, NAME, @RI012

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.350000E-01

    > OBJ, SIZE, 1.000000E-02, 1.200000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 9.000000E+02

    ************************************************************

    STOP

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  5. Tungsten Reactor
  6. The tungsten reactor has a showerhead inlet, the details of which are not modelled; instead a uniform inlet is specified. The inlet flow is 6% hydrogen and 94% tungsten hexafluoride by mass, corresponding to approximately 90% hydrogen by volume. Gas-phase chemistry is less important in this case and only a single surface reaction is used in the simulation. The showerhead structure is a very significant part of the problem because of its thermal effect: it is heated radiatively by the hot tungsten susceptor (733K) and in turn passes heat to the gas by convection and to the outer wall by radiation.

    <html><head><title>Q1</title>

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    TALK=T;RUN( 1, 1)

    ************************************************************

    Q1 created by VDI menu, Version 2006, Date 21/09/06

    CPVNAM=VDI;SPPNAM=CVD

    ************************************************************

    Echo DISPLAY / USE settings

    DISPLAY

    This file simulates a simple chemical vapour deposition

    reactor for depositing tungsten; the reactor is axisymmetric

    and the geometry was provided by Siemens.

    Laminar, steady-state flow is assumed.

    The susceptor temperature is 733K.

    ENDDIS

    ************************************************************

    IRUNN = 1 ;LIBREF = 304

    ************************************************************

    Group 1. Run Title

    TEXT(Tungsten Reactor - normal inlet :D304)

    ************************************************************

    Group 2. Transience

    STEADY = T

    ************************************************************

    Groups 3, 4, 5 Grid Information

    * Overall number of cells, RSET(M,NX,NY,NZ,tolerance)

    RSET(M,1,37,35,7.347740E-05)

    * Cylindrical-polar grid

    CARTES=F

    ************************************************************

    Group 6. Body-Fitted coordinates

    ************************************************************

    Group 7. Variables: STOREd,SOLVEd,NAMEd

    ONEPHS = T

    * Non-default variable names

    NAME( 16) =S177 ; NAME( 17) =S80

    NAME( 18) =S97 ; NAME(139) =SPH1

    NAME(140) =KOND ; NAME(141) =ENUL

    NAME(142) =BLOK ; NAME(143) =PRPS

    NAME(144) =DEPO ; NAME(147) =EMIS

    NAME(148) =VPOR ; NAME(149) =RHO1

    NAME(150) =TEM1

    * Solved variables list

    SOLVE(P1 ,V1 ,W1 ,S80 ,S97 ,TEM1)

    * Stored variables list

    STORE(RHO1,VPOR,EMIS,DEPO,PRPS,BLOK,ENUL,KOND)

    STORE(SPH1,S177)

    * Additional solver options

    SOLUTN(P1 ,Y,Y,Y,N,N,N)

    SOLUTN(S80 ,Y,Y,Y,N,N,Y)

    SOLUTN(S97 ,Y,Y,Y,N,N,Y)

    SOLUTN(TEM1,Y,Y,Y,N,N,Y)

    IVARBK = -1 ;ISOLBK = 1

    ************************************************************

    Group 8. Terms & Devices

    DIFCUT = 0.000000E+00

    NEWRH1 = T

    NEWENL = T

    UDIFF = T

    UDIFNE = T

    USOURC = T

    ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0

    ************************************************************

    Group 9. Properties

    PRESS0 = 1.330000E+02

    * Domain material index is 70 signifying:

    * CVD_GAS

    SETPRPS(1, 70,Q1)

    ENUT = 0.000000E+00

    DVO1DT = 1.000000E+00

    PRNDTL(S80 ) = -GRND8 ;PRNDTL(S97 ) = -GRND8

    PRNDTL(TEM1) = -GRND8

    PRLH1A = 0.000000E+00 ;PRLH1B = 0.000000E+00

    PRLH1C = 0.000000E+00

    * List of user-defined materials to be read by EARTH

    MATFLG=T;IMAT=2

    * Name

    *Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.

    * <CVD_GAS>

    70 GRND8 GRND8 GRND8 GRND8 1.000 0.000

    * constants for GRND option no 1

    0 0

    * constants for GRND option no 2

    0 0

    * constants for GRND option no 3

    0 0

    * constants for GRND option no 4

    0 0

    * <USRM2>

    154 1.926E4 1.0 134.0 178.0 0.0 0.0

    ************************************************************

    Group 10.Inter-Phase Transfer Processes

    ************************************************************

    Group 11.Initialise Var/Porosity Fields

    FIINIT(P1 ) = 0.000000E+00 ;FIINIT(V1 ) = 0.000000E+00

    FIINIT(W1 ) = 0.000000E+00 ;FIINIT(S177) = 9.400000E-01

    FIINIT(S80 ) = 6.000000E-02 ;FIINIT(S97 ) = 1.001000E-10

    FIINIT(ENUL) = 1.001000E-10 ;FIINIT(BLOK) = 1.000000E+00

    FIINIT(PRPS) = -1.000000E+00 ;FIINIT(DEPO) = 1.001000E-10

    FIINIT(EMIS) = 0.000000E+00 ;FIINIT(VPOR) = 1.000000E+00

    FIINIT(RHO1) = 1.001000E-10 ;FIINIT(TEM1) = 2.930000E+02

    No PATCHes used for this Group

    INIADD = F

    ************************************************************

    Group 12. Convection and diffusion adjustments

    No PATCHes used for this Group

    ************************************************************

    Group 13. Boundary & Special Sources

    PATCH (RELT ,PHASEM,1,1,1,21,1,23,1,1)

    COVAL (RELT ,S177, GRND1 , SAME )

    COVAL (RELT ,S80 , GRND1 , SAME )

    COVAL (RELT ,S97 , GRND1 , SAME )

    EGWF = F

    ************************************************************

    Group 14. Downstream Pressure For PARAB

    ************************************************************

    Group 15. Terminate Sweeps

    LSWEEP = 200

    RESFAC = 1.000000E-06

    ************************************************************

    Group 16. Terminate Iterations

    ************************************************************

    Group 17. Relaxation

    RELAX(P1 ,LINRLX, 1.000000E+00)

    RELAX(V1 ,FALSDT, 1.000000E+03)

    RELAX(W1 ,FALSDT, 1.000000E+03)

    RELAX(S80 ,FALSDT, 1.000000E+02)

    RELAX(S97 ,FALSDT, 1.000000E+02)

    RELAX(TEM1,LINRLX, 7.000000E-01)

    ************************************************************

    Group 18. Limits

    VARMAX(P1 ) = 1.000000E+10 ;VARMIN(P1 ) =-1.064000E+02

    VARMAX(V1 ) = 1.000000E+06 ;VARMIN(V1 ) =-1.000000E+06

    VARMAX(W1 ) = 1.000000E+06 ;VARMIN(W1 ) =-1.000000E+06

    VARMAX(S177) = 1.000000E+00 ;VARMIN(S177) = 1.000000E-20

    VARMAX(S80 ) = 1.000000E+00 ;VARMIN(S80 ) = 1.000000E-20

    VARMAX(S97 ) = 1.000000E+00 ;VARMIN(S97 ) = 1.000000E-20

    VARMAX(TEM1) = 3.000000E+03 ;VARMIN(TEM1) = 2.600000E+02

    ************************************************************

    Group 19. EARTH Calls To GROUND Station

    USEGRD = T ;USEGRX = T

    NAMGRD =CVD

    S2SR = T

    ASAP = T

    PARSOL = T

    CSG10 ='q1'

    SPEDAT(SET,CVD,VOLIN,L,F)

    SPEDAT(SET,CVD,MCDOPT,I,2)

    SPEDAT(SET,CVD,BINOPT,I,4)

    SPEDAT(SET,CVD,MCPROP,I,3)

    SPEDAT(SET,CVD,CHMRLX,R,5.00000E-01)

    SPEDAT(SET,CVD,NSREAC,I,1)

    SPEDAT(SET,CVD,SREAC(1),I,17)

    SPEDAT(SET,CVD,XMIR,L,F)

    SPEDAT(SET,CVD,YMIR,L,F)

    SPEDAT(SET,CVD,ZMIR,L,F)

    SPEDAT(SET,CVD,AXIBFC,L,F)

    SPEDAT(SET,CVD,NOSPCT,L,F)

    SPEDAT(SET,CVD,FINE3D,L,F)

    SPEDAT(SET,CVD,VFNORM,L,T)

    SPEDAT(SET,CVD,NUMRAY,I,1)

    SPEDAT(SET,CVD,RADCVD,L,T)

    SPEDAT(SET,CVD,OPTTEM,R,3.28000E+02)

    SPEDAT(SET,CVD,OPTMAT,R,1.11000E+02)

    SPEDAT(SET,CVD,EXTBOU,C,TEMPERATURE)

    SPEDAT(SET,CVD,EXTTEM,R,3.28000E+02)

    ************************************************************

    Group 20. Preliminary Printout

    ECHO = T

    ************************************************************

    Group 21. Print-out of Variables

    ************************************************************

    Group 22. Monitor Print-Out

    IXMON = 1 ;IYMON = 19 ;IZMON = 29

    NPRMON = 100000

    NPRMNT = 1

    TSTSWP = -1

    ************************************************************

    Group 23.Field Print-Out & Plot Control

    NPRINT = 100000

    ISWPRF = 1 ;ISWPRL = 100000

    No PATCHes used for this Group

    ************************************************************

    Group 24. Dumps For Restarts

    GVIEW(P,-9.819036E-01,1.200022E-01,1.465084E-01)

    GVIEW(UP,1.195696E-01,9.927558E-01,-1.178796E-02)

    > DOM, SIZE, 1.000000E-01, 1.570000E-01, 1.689980E-01

    > DOM, MONIT, 5.000000E-02, 1.052967E-01, 1.535078E-01

    > DOM, SCALE, 1.000000E+00, 1.000000E+00, 1.000000E+00

    > DOM, SNAPSIZE, 1.000000E-02

    > GRID, AUTO, T T T

    > GRID, MINCELL, 5.000000E-03, 1.000000E-01, 1.000000E-01

    > GRID, RSET_X_1, 1, 1.000000E+00

    > GRID, RSET_Y_1, 13,-1.200000E+00,G

    > GRID, RSET_Y_2, -4, 1.200000E+00,G

    > GRID, RSET_Y_3, -6, 1.200000E+00,G

    > GRID, RSET_Y_4, -4, 1.200000E+00,G

    > GRID, RSET_Y_5, -6, 1.200000E+00,G

    > GRID, RSET_Y_6, 4, 1.200000E+00,G

    > GRID, RSET_Z_1, 8,-1.200000E+00,G

    > GRID, RSET_Z_2, -8, 1.200000E+00,G

    > GRID, RSET_Z_3, -5, 1.200000E+00,G

    > GRID, RSET_Z_4, -8, 1.200000E+00,G

    > GRID, RSET_Z_5, -2, 1.200000E+00,G

    > GRID, RSET_Z_6, 4, 1.200000E+00,G

    > OBJ, NAME, BLK1

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.549980E-01

    > OBJ, SIZE, 1.000000E-01, 1.020000E-01, 1.400001E-02

    > OBJ, GEOMETRY, polcu7

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 154,USRM2

    > OBJ, FIXED_TMP, 0.000000E+00, 7.330000E+02

    > OBJ, INI_BLOK, 2.000000E+00

    > OBJ, SUF_REAC_L, YES

    > OBJ, BATCH_F_L, 1.000000E+00

    > OBJ, NAME, BLK1A

    > OBJ, POSITION, 0.000000E+00, 1.020000E-01, 1.549980E-01

    > OBJ, SIZE, 1.000000E-01, 1.500000E-02, 1.400001E-02

    > OBJ, GEOMETRY, polcu8

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 154,USRM2

    > OBJ, INI_BLOK, 3.000000E+00

    > OBJ, SUF_REAC_L, YES

    > OBJ, BATCH_F_L, 1.000000E+00

    > OBJ, NAME, BLK2

    > OBJ, POSITION, 0.000000E+00, 9.500000E-02, 0.000000E+00

    > OBJ, SIZE, 1.000000E-01, 6.199999E-02, 4.999999E-02

    > OBJ, GEOMETRY, polcu7

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 198,Solid with smooth-wall friction

    > OBJ, SURF_TEMP_S, 0.000000E+00, 3.280000E+02

    > OBJ, SURF_TEMP_H, 0.000000E+00, 3.280000E+02

    > OBJ, NAME, BLK3

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 9.700000E-02

    > OBJ, SIZE, 1.000000E-01, 1.470000E-01, 2.599999E-02

    > OBJ, GEOMETRY, polcu8

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)

    > OBJ, INI_BLOK, 4.000000E+00

    > OBJ, NAME, BLK4

    > OBJ, POSITION, 0.000000E+00, 1.290000E-01, 1.230000E-01

    > OBJ, SIZE, 1.000000E-01, 1.799999E-02, 3.599799E-02

    > OBJ, GEOMETRY, polcu8

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, BLOCKAGE

    > OBJ, MATERIAL, 111,STEEL at 27 deg c (C = 1%)

    > OBJ, INI_BLOK, 5.000000E+00

    > OBJ, NAME, INLET

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.230000E-01

    > OBJ, SIZE, 1.000000E-01, 1.020000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcu5t

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, INLET

    > OBJ, DENSITY, 1.700000E-03

    > OBJ, VELOCITY, 0.000000E+00, 0.000000E+00, 4.035000E+00

    > OBJ, TEMPERATURE, 2.930000E+02

    > OBJ, INLET_S80, 6.000000E-02

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, NAME, OUT

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00

    > OBJ, SIZE, 1.000000E-01, 9.500000E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcubet

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, OUTLET

    > OBJ, PRESSURE, 0.000000E+00

    > OBJ, TEMPERATURE, SAME

    > OBJ, COEFFICIENT, 1.000000E+03

    > OBJ, VELOCITY, 0.000000E+00, SAME , SAME

    > OBJ, OUTLET_S80, SAME

    > OBJ, OUTLET_S97, SAME

    > OBJ, NAME, FLOOR

    > OBJ, POSITION, 0.000000E+00, 1.170000E-01, 1.689980E-01

    > OBJ, SIZE, 1.000000E-01, 3.999999E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcu2

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, PLATE

    > OBJ, SURF_TEMP, 0.000000E+00, 3.280000E+02

    > OBJ, NAME, WALL

    > OBJ, POSITION, 0.000000E+00, 1.570000E-01, 4.999999E-02

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.189980E-01

    > OBJ, GEOMETRY, polcu2

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, PLATE

    > OBJ, SURF_TEMP, 0.000000E+00, 3.280000E+02

    > OBJ, NAME, B15

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.549980E-01

    > OBJ, SIZE, 1.000000E-01, 1.020000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.540000E+02

    > OBJ, OPTIC_TEMP, 7.330000E+02

    > OBJ, NAME, B16

    > OBJ, POSITION, 0.000000E+00, 1.170000E-01, 1.549980E-01

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.400000E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.540000E+02

    > OBJ, OPTIC_TEMP, 7.330000E+02

    > OBJ, NAME, B17

    > OBJ, POSITION, 0.000000E+00, 1.020000E-01, 1.549980E-01

    > OBJ, SIZE, 1.000000E-01, 1.500001E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.540000E+02

    > OBJ, OPTIC_TEMP, 7.330000E+02

    > OBJ, NAME, B18

    > OBJ, POSITION, 0.000000E+00, 9.500000E-02, 0.000000E+00

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 4.999999E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 3.280000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.280000E+02

    > OBJ, NAME, B19

    > OBJ, POSITION, 0.000000E+00, 9.500000E-02, 4.999999E-02

    > OBJ, SIZE, 1.000000E-01, 6.200001E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 3.280000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.280000E+02

    > OBJ, NAME, B20

    > OBJ, POSITION, 0.000000E+00, 1.470000E-01, 9.700000E-02

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 2.599999E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 4.400000E+02

    > OBJ, NAME, B21

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 9.700000E-02

    > OBJ, SIZE, 1.000000E-01, 1.470000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 4.400000E+02

    > OBJ, NAME, B22

    > OBJ, POSITION, 0.000000E+00, 1.290000E-01, 1.230000E-01

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 3.599801E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, OBJECT-SIDE, HIGH

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 4.400000E+02

    > OBJ, NAME, B23

    > OBJ, POSITION, 0.000000E+00, 1.470000E-01, 1.230000E-01

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 3.599801E-02

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 4.400000E+02

    > OBJ, NAME, B24

    > OBJ, POSITION, 0.000000E+00, 1.290000E-01, 1.589980E-01

    > OBJ, SIZE, 1.000000E-01, 1.800001E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 4.400000E+02

    > OBJ, NAME, B25

    > OBJ, POSITION, 0.000000E+00, 1.170000E-01, 1.689980E-01

    > OBJ, SIZE, 1.000000E-01, 4.000000E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 3.280000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.280000E+02

    > OBJ, NAME, B26

    > OBJ, POSITION, 0.000000E+00, 1.570000E-01, 4.999999E-02

    > OBJ, SIZE, 1.000000E-01, 0.000000E+00, 1.189980E-01

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 3.280000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.280000E+02

    > OBJ, NAME, B27

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00

    > OBJ, SIZE, 1.000000E-01, 9.500000E-02, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, SURF_TEMP, 3.280000E+02

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 3.280000E+02

    > OBJ, NAME, B28

    > OBJ, POSITION, 0.000000E+00, 0.000000E+00, 1.230000E-01

    > OBJ, SIZE, 1.000000E-01, 1.290000E-01, 0.000000E+00

    > OBJ, GEOMETRY, polcusrf

    > OBJ, ROTATION24, 1

    > OBJ, TYPE, RAD_SURF

    > OBJ, SETTING, AUTO

    > OBJ, TEMP_COEF, GRND1

    > OBJ, OPTIC_INDX, 1.110000E+02

    > OBJ, OPTIC_TEMP, 4.400000E+02

    ************************************************************

    STOP

    </strong></pre></body></html>


  7. Parallel Plate Plasma Reactor

The plasma enhanced reactor is for silicon deposition from pure silane. Three gas-phase and two surface reactions are included, all dependent on the state of the plasma. The gas-phase reaction rates all exhibit dependence on ionization rate while the surface reaction rates all have an Arrhenius formulation, based on surface temperature, multiplied by the ion flux to the surface. (The reactions defined in CHEMIDAT for this simulation are for demonstration purposes only.)

<html><head><title>Q1</title>

<link rel="stylesheet" type="text/css" href="/phoenics/d_polis/polstyle.css">

</head><body><pre><strong>

TALK=T;RUN( 1, 1)

************************************************************

Q1 created by VDI menu, Version 2006, Date 21/09/06

CPVNAM=VDI;SPPNAM=CVD

************************************************************

Echo DISPLAY / USE settings

DISPLAY

This case simulates a reactor using a plasma to enhance

the gas phase chemistry. The reactor is axisymmetric,

the geometry shown below.

Laminar, steady-state flow is assumed.

The susceptor temperature is 533K.

ENDDIS

************************************************************

IRUNN = 1 ;LIBREF = 309

************************************************************

Group 1. Run Title

TEXT(Parallel Plate Plasma Reactor :D309)

************************************************************

Group 2. Transience

STEADY = T

************************************************************

Groups 3, 4, 5 Grid Information

* Overall number of cells, RSET(M,NX,NY,NZ,tolerance)

RSET(M,1,20,20,1.000000E-05)

* Cylindrical-polar grid

CARTES=F

************************************************************

Group 6. Body-Fitted coordinates

************************************************************

Group 7. Variables: STOREd,SOLVEd,NAMEd

ONEPHS = T

* Non-default variable names

NAME( 16) =S140 ; NAME( 17) =S142

NAME( 18) =S145 ; NAME( 19) =S158

NAME( 20) =S80 ; NAME(135) =EMIS

NAME(136) =SPHT ; NAME(137) =ENUL

NAME(138) =BLOK ; NAME(139) =PRPS

NAME(140) =DEPO ; NAME(141) =VPOR

NAME(142) =RHO1 ; NAME(143) =GION

NAME(144) =GAMM ; NAME(145) =PHIT

NAME(146) =T0 ; NAME(147) =NE

NAME(148) =PHI2 ; NAME(149) =PHI1

NAME(150) =TEM1

* Solved variables list

SOLVE(P1 ,V1 ,W1 ,S142,S145,S158,S80 ,T0 )

SOLVE(NE ,PHI2,PHI1,TEM1)

* Stored variables list

STORE(PHIT,GAMM,GION,RHO1,VPOR,DEPO,PRPS,BLOK)

STORE(ENUL,SPHT,EMIS,S140)

* Additional solver options

SOLUTN(P1 ,Y,Y,Y,N,N,N)

SOLUTN(S142,Y,Y,Y,N,N,Y)

SOLUTN(S145,Y,Y,Y,N,N,Y)

SOLUTN(S158,Y,Y,Y,N,N,Y)

SOLUTN(S80 ,Y,Y,Y,N,N,Y)

SOLUTN(T0 ,Y,Y,Y,N,N,Y)

SOLUTN(NE ,Y,Y,Y,N,N,Y)

SOLUTN(PHI2,Y,Y,Y,N,N,Y)

SOLUTN(PHI1,Y,Y,Y,N,N,Y)

SOLUTN(TEM1,Y,Y,Y,N,N,Y)

IVARBK = -1 ;ISOLBK = 1

************************************************************

Group 8. Terms & Devices

TERMS (T0 ,N,N,Y,Y,Y,N)

TERMS (NE ,N,N,Y,Y,Y,N)

TERMS (PHI2,N,N,Y,Y,Y,N)

TERMS (PHI1,N,N,Y,Y,Y,N)

DIFCUT = 0.000000E+00

ADDDIF = T

NEWRH1 = T

NEWENL = T

UDIFNE = T

USOURC = T

ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0

************************************************************

Group 9. Properties

PRESS0 = 1.000000E+01

* Domain material index is 70 signifying:

* NOTSET

SETPRPS(1, 70,Q1)

ENUT = 0.000000E+00

DVO1DT = 1.000000E+00

PRNDTL(S142) = -GRND8 ;PRNDTL(S145) = -GRND8

PRNDTL(S158) = -GRND8 ;PRNDTL(S80 ) = -GRND8

PRNDTL(T0 ) = -GRND7 ;PRNDTL(NE ) = -GRND7

PRNDTL(PHI2) = -GRND7 ;PRNDTL(PHI1) = -GRND7

PRNDTL(TEM1) = -GRND8

PRLH1A = 0.000000E+00 ;PRLH1B = 0.000000E+00

PRLH1C = 0.000000E+00

* List of user-defined materials to be read by EARTH

MATFLG=T;IMAT=1

* Name

*Ind. Dens. Viscos. Spec.heat Conduct. Expans. Compr.

* <CVD_GAS>

70 GRND8 GRND8 GRND8 GRND8 1.000 0.000

* constants for GRND option no 1

0 0

* constants for GRND option no 2

0 0

* constants for GRND option no 3

0 0

* constants for GRND option no 4

0 0

************************************************************

Group 10.Inter-Phase Transfer Processes

************************************************************

Group 11.Initialise Var/Porosity Fields

FIINIT(P1 ) = 0.000000E+00 ;FIINIT(V1 ) = 0.000000E+00

FIINIT(W1 ) = 0.000000E+00 ;FIINIT(S140) = 1.000000E+00

FIINIT(S142) = 1.001000E-10 ;FIINIT(S145) = 1.001000E-10

FIINIT(S158) = 1.001000E-10 ;FIINIT(S80 ) = 1.001000E-10

FIINIT(SPHT) = 1.001000E-10 ;FIINIT(ENUL) = 1.001000E-10

FIINIT(BLOK) = 1.000000E+00 ;FIINIT(PRPS) = -1.000000E+00

FIINIT(DEPO) = 1.001000E-10 ;FIINIT(VPOR) = 1.000000E+00

FIINIT(RHO1) = 1.001000E-10 ;FIINIT(GION) = 1.001000E-10

FIINIT(GAMM) = 1.001000E-10 ;FIINIT(PHIT) = 1.001000E-10

FIINIT(T0 ) = 1.100000E+04 ;FIINIT(NE ) = 1.000000E-02

FIINIT(PHI2) = 0.000000E+00 ;FIINIT(PHI1) = 1.000000E+02

FIINIT(TEM1) = 3.000000E+02

No PATCHes used for this Group

INIADD = F

************************************************************

Group 12. Convection and diffusion adjustments

No PATCHes used for this Group

************************************************************

Group 13. Boundary & Special Sources

INLET (VIN1 ,LOW ,3,0,0,0,0,0,1,1)

VALUE (VIN1 ,P1 , 1.000000E+01)

VALUE (VIN1 ,V1 , 0.000000E+00)

VALUE (VIN1 ,W1 , 3.037604E-02)

VALUE (VIN1 ,S140, 1.000000E+00)

VALUE (VIN1 ,S142, 0.000000E+00)

VALUE (VIN1 ,S145, 0.000000E+00)

VALUE (VIN1 ,S158, 0.000000E+00)

VALUE (VIN1 ,S80 , 0.000000E+00)

VALUE (VIN1 ,T0 , 0.000000E+00)

VALUE (VIN1 ,NE , 0.000000E+00)

VALUE (VIN1 ,PHI2, 0.000000E+00)

VALUE (VIN1 ,PHI1, 0.000000E+00)

VALUE (VIN1 ,TEM1, 3.000000E+02)

PATCH (ELE1BOT ,LOW ,6,0,0,0,0,0,1,1)

COVAL (ELE1BOT ,NE , GRND7 , 0.000000E+00)

COVAL (ELE1BOT ,PHI2, FIXFLU , GRND7 )

COVAL (ELE1BOT ,PHI1, FIXFLU , GRND7 )

PATCH (ELRING ,LOW ,7,0,0,0,0,0,1,1)

COVAL (ELRING ,NE , GRND7 , 0.000000E+00)

COVAL (ELRING ,PHI2, FIXFLU , GRND7 )

COVAL (ELRING ,PHI1, FIXFLU , GRND7 )

PATCH (COOL ,VOLUME,0,0,0,0,0,0,1,1)

COVAL (COOL ,T0 , GRND7 , GRND7 )

COVAL (COOL ,NE , GRND7 , GRND7 )

PATCH (IONIZE ,VOLUME,0,0,0,0,0,0,1,1)

COVAL (IONIZE ,T0 , GRND7 , GRND7 )

COVAL (IONIZE ,NE , GRND7 , GRND7 )

PATCH (CHEM1 ,VOLUME,0,0,0,0,0,0,1,1)

COVAL (CHEM1 ,S142, GRND1 , GRND1 )

COVAL (CHEM1 ,S145, GRND1 , GRND1 )

COVAL (CHEM1 ,S158, GRND1 , GRND1 )

COVAL (CHEM1 ,S80 , GRND1 , GRND1 )

COVAL (CHEM1 ,TEM1, GRND1 , GRND1 )

PATCH (RELT ,PHASEM,0,0,0,0,0,0,1,1)

COVAL (RELT ,S142, GRND1 , SAME )

COVAL (RELT ,S145, GRND1 , SAME )

COVAL (RELT ,S158, GRND1 , SAME )

COVAL (RELT ,S80 , GRND1 , SAME )

EGWF = T

************************************************************

Group 14. Downstream Pressure For PARAB

************************************************************

Group 15. Terminate Sweeps

LSWEEP = 300

RESFAC = 1.000000E-03

************************************************************

Group 16. Terminate Iterations

LITER (S142) = 200 ;LITER (S145) = 200

LITER (S158) = 200 ;LITER (S80 ) = 200

************************************************************

Group 17. Relaxation

RELAX(P1 ,LINRLX, 1.000000E+00)

RELAX(V1 ,FALSDT, 1.000000E-04)

RELAX(W1 ,FALSDT, 1.000000E-04)

RELAX(S142,FALSDT, 1.000000E+00)

RELAX(S145,FALSDT, 1.000000E+00)

RELAX(S158,FALSDT, 1.000000E+00)

RELAX(S80 ,FALSDT, 1.000000E+00)

RELAX(T0 ,FALSDT, 1.000000E-08)

RELAX(NE ,FALSDT, 1.000000E-08)

RELAX(PHI2,FALSDT, 1.000000E-06)

RELAX(PHI1,FALSDT, 1.000000E-06)

RELAX(TEM1,LINRLX, 3.000000E-01)

************************************************************

Group 18. Limits

VARMAX(P1 ) = 1.000000E+10 ;VARMIN(P1 ) =-8.000000E+00

VARMAX(V1 ) = 1.000000E+06 ;VARMIN(V1 ) =-1.000000E+06

VARMAX(W1 ) = 1.000000E+06 ;VARMIN(W1 ) =-1.000000E+06

VARMAX(S140) = 1.000000E+00 ;VARMIN(S140) = 1.000000E-20

VARMAX(S142) = 1.000000E+00 ;VARMIN(S142) = 1.000000E-20

VARMAX(S145) = 1.000000E+00 ;VARMIN(S145) = 1.000000E-20

VARMAX(S158) = 1.000000E+00 ;VARMIN(S158) = 1.000000E-20

VARMAX(S80 ) = 1.000000E+00 ;VARMIN(S80 ) = 1.000000E-20

VARMAX(TEM1) = 3.000000E+03 ;VARMIN(TEM1) = 2.600000E+02

************************************************************

Group 19. EARTH Calls To GROUND Station

USEGRD = T ;USEGRX = T

NAMGRD =CVD

ASAP = T

PARSOL = T

CSG10 ='q1'

SPEDAT(SET,CVD,MCDOPT,I,2)

SPEDAT(SET,CVD,BINOPT,I,4)

SPEDAT(SET,CVD,MCPROP,I,3)

SPEDAT(SET,CVD,CHMRLX,R,1.00000E+00)

SPEDAT(SET,CVD,NGREAC,I,3)

SPEDAT(SET,CVD,GREAC(1),I,18)

SPEDAT(SET,CVD,GREAC(2),I,21)

SPEDAT(SET,CVD,GREAC(3),I,22)

SPEDAT(SET,CVD,NSREAC,I,2)

SPEDAT(SET,CVD,SREAC(1),I,19)

SPEDAT(SET,CVD,SREAC(2),I,20)

SPEDAT(SET,CVD,PLASMA,L,T)

SPEDAT(SET,CVD,PHIPAR(1),R,2.00000E+00)

SPEDAT(SET,CVD,PHIPAR(2),R,8.00000E-01)

SPEDAT(SET,CVD,PHIPAR(3),R,0.00000E+00)

SPEDAT(SET,CVD,PHIPAR(4),R,2.00000E+02)

SPEDAT(SET,CVD,NEPAR(1),R,1.80000E+01)

SPEDAT(SET,CVD,NEPAR(2),R,5.00000E+05)

SPEDAT(SET,CVD,NEPAR(3),R,3.00000E+05)

SPEDAT(SET,CVD,NEPAR(4),R,1.30000E+05)

SPEDAT(SET,CVD,NEPAR(5),R,1.80000E-01)

SPEDAT(SET,CVD,T0PAR(2),R,3.00000E-01)

SPEDAT(SET,CVD,T0PAR(1),R,3.50000E+03)

SPEDAT(SET,CVD,T0PAR(3),R,6.00000E+05)

SPEDAT(SET,CVD,T0PAR(4),R,1.00000E+04)

SPEDAT(SET,CVD,LNELIM,L,F)

SPEDAT(SET,CVD,RADCVD,L,T)

************************************************************

Group 20. Preliminary Printout

ECHO = T

************************************************************

Group 21. Print-out of Variables

************************************************************

Group 22. Monitor Print-Out

IXMON = 1 ;IYMON = 1 ;IZMON = 9

NPRMON = 100000

NPRMNT = 1

TSTSWP = -1

************************************************************

Group 23.Field Print-Out & Plot Control

NPRINT = 100000

YZPR = T

ISWPRF = 1 ;ISWPRL = 100000

No PATCHes used for this Group

************************************************************

Group 24. Dumps For Restarts

GVIEW(P,-1.000000E+00,0.000000E+00,0.000000E+00)

GVIEW(UP,0.000000E+00,1.000000E+00,0.000000E+00)

> DOM, SIZE, 1.000000E-01, 1.630000E-01, 6.540000E-02

> DOM, MONIT, 0.000000E+00, 2.500000E-03, 2.890000E-02

> DOM, SCALE, 1.000000E+00, 1.000000E+00, 1.000000E+00

> DOM, SNAPSIZE, 1.000000E-02

> GRID, AUTO, T T T

> GRID, RSET_X_1, 1, 1.000000E+00

> GRID, RSET_Y_1, 12, 1.000000E+00

> GRID, RSET_Y_2, 4, 1.000000E+00

> GRID, RSET_Y_3, 4, 1.000000E+00

> GRID, RSET_Z_1, 3, 1.000000E+00

> GRID, RSET_Z_2, 6, 1.000000E+00

> GRID, RSET_Z_3, 11, 1.000000E+00

> OBJ, NAME, LOELEC

> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 0.000000E+00

> OBJ, SIZE, 1.000000E-01, 1.300000E-01, 9.999998E-03

> OBJ, GEOMETRY, polcu7

> OBJ, ROTATION24, 1

> OBJ, TYPE, BLOCKAGE

> OBJ, MATERIAL, 198,Solid with smooth-wall friction

> OBJ, SURF_TEMP_H, 0.000000E+00, 3.000000E+02

> OBJ, NAME, UPELEC

> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 2.940000E-02

> OBJ, SIZE, 1.000000E-01, 1.000000E-01, 3.600000E-02

> OBJ, GEOMETRY, polcu7

> OBJ, ROTATION24, 1

> OBJ, TYPE, BLOCKAGE

> OBJ, MATERIAL, 198,Solid with smooth-wall friction

> OBJ, LINR_HEAT_L, FIXVAL , 5.330000E+02

> OBJ, PLASMA_N, EARTHED

> OBJ, SUF_REAC_L, YES

> OBJ, BATCH_F_L, 1.000000E+00

> OBJ, PLASMA_L, EARTHED

> OBJ, NAME, VIN1

> OBJ, POSITION, 0.000000E+00, 1.300000E-01, 0.000000E+00

> OBJ, SIZE, 1.000000E-01, 3.300002E-02, 0.000000E+00

> OBJ, GEOMETRY, poldef

> OBJ, ROTATION24, 1

> OBJ, TYPE, USER_DEFINED

> OBJ, NAME, OUTLET

> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 6.540000E-02

> OBJ, SIZE, 1.000000E-01, 6.300000E-02, 0.000000E+00

> OBJ, GEOMETRY, polcubet

> OBJ, ROTATION24, 1

> OBJ, TYPE, OUTLET

> OBJ, PRESSURE, 0.000000E+00

> OBJ, TEMPERATURE, SAME

> OBJ, COEFFICIENT, 1.000000E+00

> OBJ, OUTLET_S142, SAME

> OBJ, OUTLET_S145, SAME

> OBJ, OUTLET_S158, SAME

> OBJ, OUTLET_S80, SAME

> OBJ, NAME, WALL0

> OBJ, POSITION, 0.000000E+00, 1.630000E-01, 0.000000E+00

> OBJ, SIZE, 1.000000E-01, 0.000000E+00, 6.540000E-02

> OBJ, GEOMETRY, polcu2

> OBJ, ROTATION24, 1

> OBJ, TYPE, PLATE

> OBJ, SURF_TEMP, 0.000000E+00, 3.000000E+02

> OBJ, PLASMA, EARTHED

> OBJ, NAME, ELE1BOT

> OBJ, POSITION, 0.000000E+00, 0.000000E+00, 9.999998E-03

> OBJ, SIZE, 1.000000E-01, 1.000000E-01, 0.000000E+00

> OBJ, GEOMETRY, poldef

> OBJ, ROTATION24, 1

> OBJ, TYPE, USER_DEFINED

> OBJ, NAME, ELRING

> OBJ, POSITION, 0.000000E+00, 1.000000E-01, 9.999998E-03

> OBJ, SIZE, 1.000000E-01, 2.999998E-02, 0.000000E+00

> OBJ, GEOMETRY, poldef

> OBJ, ROTATION24, 1

> OBJ, TYPE, USER_DEFINED

************************************************************

STOP

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