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PHOENICS-CVD USER GUIDE

Appendix 2; Sample Q1 Files

CHAM Technical Report TR/314

PHOENICS Version 2012

Document last revised 23/04/13

Contents

1. Inroduction

2. ASM Single-Wafer Reactor for Silicon Deposition

3. Tungsten Reactor

4. Parallel Plate Plasma Reactor


  1. Inroduction

    Three input 'q1' files are presented here. These have been constructed for the simulation of an ASM single-wafer reactor for silicon deposition, a tungsten reactor and a parallel plate plasma reactor, also for silicon deposition. All geometries are axisymmetric and laminar, steady-state conditions are assumed. Although these examples are based on real cases it should be noted that some of the parameters are selected for demonstration purposes. The 'q1' files are also provided in the code installation as library cases.


  2. ASM Single-Wafer Reactor for Silicon Deposition
  3. The inlet flow is 88.7% nitrogen and 11.3% silane by mass, at a temperature of 290K. The susceptor is held at a temperature of 900K and all outside walls are cooled to a temperature of 290K. Five gas-phase and five surface reactions are activated.

    
     TALK=T;RUN( 1, 1)
     
     ************************************************************
       Q1 created by VDI menu, Version 2013, Date 23/03/13
     CPVNAM=VDI;SPPNAM=CVD
     ************************************************************
      Echo DISPLAY / USE settings
      DISPLAY
       This q1 file simulates an ASM single wafer chemical vapour
       deposition reactor using Wilke diffusion; the  reactor is
       axisymmetric and the geometry was provided by TU Delft.
       Laminar, steady-state flow is assumed.
     
        ------> Y
       |
       |
       | Z
       V
     
        |     INLET FLOW      |**********************|
       C|    PLUG PROFILE     |**********************|
       E|||||||||||||||||||||||**********************|
       N|VVVVVVVVVVVVVVVVVVVVV|***** BLOCKAGE *******|W
       T|                     |**********************|A
       R|          |          |**********************|L
       E|          V          |   ___________________|L
        |                     |**|                   |
       L|                     |**|                   |
       I|          |          |**|                   |
       N|          V          |**|                   |
       E|                     |__|                   |
        |                                            |
        |          |                                 |W
       C|          V                                 |A
       E|                  -->      -->         |    |L
       N|                                       V    |L
       T|                                            |
       R|                                            |
       E|___________________________                 |
        |****** SUSCEPTOR **********|           |    |
       L|***************************|_______    V    |
       I|***********************************|        |
       N|***********************************|        |W
       E|***********************************|        |A
        |***********************************|   |    |L
        |************ BLOCKAGE *************|   V    |L
        |***********************************|        |
        |***********************************|        |
        |***********************************|        |
        |***********************************|PRESSURE|
        |***********************************| OUTLET |
     
      ENDDIS
     ************************************************************
     IRUNN = 1 ;LIBREF = 100
     ************************************************************
      Group 1. Run Title
     TEXT(ASM Single Wafer Si Reactor - Wilke:D100)
     ************************************************************
      Group 2. Transience
     STEADY = T
     ************************************************************
      Groups 3, 4, 5  Grid Information
        * Overall number of cells, RSET(M,NX,NY,NZ,tolerance)
     RSET(M,1,18,26,1.0E-05)
        * Cylindrical-polar grid
     CARTES=F
     ************************************************************
      Group 6. Body-Fitted coordinates
     ************************************************************
      Group 7. Variables: STOREd,SOLVEd,NAMEd
        * Non-default variable names
     NAME(16)=S116 ;NAME(17)=S140
     NAME(18)=S142 ;NAME(19)=S145
     NAME(20)=S158 ;NAME(21)=S147
     NAME(22)=S80 ;NAME(141)=ENUL
     NAME(142)=BLOK ;NAME(143)=PRPS
     NAME(144)=DEPO ;NAME(145)=SPHT
     NAME(146)=CNDT ;NAME(147)=EMIS
     NAME(148)=VPOR ;NAME(149)=RHO1
     NAME(150) =TEM1
        * Solved variables list
     SOLVE(P1,V1,W1,S140,S142,S145,S158,S147)
     SOLVE(S80,TEM1)
        * Stored variables list
     STORE(RHO1,VPOR,EMIS,CNDT,SPHT,DEPO,PRPS,BLOK)
     STORE(ENUL,S116)
        * Additional solver options
     SOLUTN(P1,Y,Y,Y,N,N,N)
     SOLUTN(S140,Y,Y,Y,N,N,Y)
     SOLUTN(S142,Y,Y,Y,N,N,Y)
     SOLUTN(S145,Y,Y,Y,N,N,Y)
     SOLUTN(S158,Y,Y,Y,N,N,Y)
     SOLUTN(S147,Y,Y,Y,N,N,Y)
     SOLUTN(S80,Y,Y,Y,N,N,Y)
     SOLUTN(TEM1,Y,Y,Y,N,N,Y)
     IVARBK = -1 ;ISOLBK = 1
     
     ************************************************************
      Group 8. Terms & Devices
     DIFCUT =0.
     NEWRH1 = T
     NEWENL = T
     UDIFNE = T
     USOURC = T
     ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
     ************************************************************
      Group 9. Properties
     PRESS0 =133.
        * Domain material index is  70 signifying:
        * NOTSET
     SETPRPS(1, 70,Q1)
     ENUT =0.
     DVO1DT =1.
     PRNDTL(S140)=-GRND8 ;PRNDTL(S142)=-GRND8
     PRNDTL(S145)=-GRND8 ;PRNDTL(S158)=-GRND8
     PRNDTL(S147)=-GRND8 ;PRNDTL(S80)=-GRND8
     PRNDTL(TEM1)=-GRND8
     PRLH1A =0. ;PRLH1B =0.
     PRLH1C =0.
       *  List of user-defined materials to be read by EARTH
        MATFLG=T;IMAT=1
       *  Name
       *Ind. Dens.  Viscos.  Spec.heat  Conduct.  Expans.  Compr.
       *  >CVD_GAS>
        70 GRND8 GRND8 GRND8 GRND8 1.000 0.000
       *       constants for GRND option no 1
        0. 0.
       *       constants for GRND option no 2
        0. 0.
       *       constants for GRND option no 3
        0. 0.
       *       constants for GRND option no 4
        0. 0.
     ************************************************************
      Group 10.Inter-Phase Transfer Processes
     ************************************************************
      Group 11.Initialise Var/Porosity Fields
     FIINIT(P1)=0. ;FIINIT(V1)=0.
     FIINIT(W1)=0. ;FIINIT(S116)=0.887
     FIINIT(S140)=0.113 ;FIINIT(S142)=1.001E-10
     FIINIT(S145)=1.001E-10 ;FIINIT(S158)=1.001E-10
     FIINIT(S147)=1.001E-10 ;FIINIT(S80)=1.001E-10
     FIINIT(ENUL)=1.001E-10 ;FIINIT(BLOK)=1.
     FIINIT(PRPS)=-1. ;FIINIT(DEPO)=1.001E-10
     FIINIT(SPHT)=1.001E-10 ;FIINIT(CNDT)=1.001E-10
     FIINIT(EMIS)=0. ;FIINIT(VPOR)=1.
     FIINIT(RHO1)=1.001E-10 ;FIINIT(TEM1)=290.
       No PATCHes used for this Group
     
     
     INIADD = F
     ************************************************************
      Group 12. Convection and diffusion adjustments
       No PATCHes used for this Group
     ************************************************************
      Group 13. Boundary & Special Sources
     
     PATCH(CHEM, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
     COVAL(CHEM, S140, GRND1, GRND1)
     COVAL(CHEM, S142, GRND1, GRND1)
     COVAL(CHEM, S145, GRND1, GRND1)
     COVAL(CHEM, S158, GRND1, GRND1)
     COVAL(CHEM, S147, GRND1, GRND1)
     COVAL(CHEM, S80, GRND1, GRND1)
     COVAL(CHEM, TEM1, GRND1, GRND1)
     
     PATCH(RELT, PHASEM, 0, 0, 0, 0, 0, 0, 1, 1)
     COVAL(RELT, S140, GRND1, SAME)
     COVAL(RELT, S142, GRND1, SAME)
     COVAL(RELT, S145, GRND1, SAME)
     COVAL(RELT, S158, GRND1, SAME)
     COVAL(RELT, S147, GRND1, SAME)
     COVAL(RELT, S80, GRND1, SAME)
     
     EGWF = T
     ************************************************************
      Group 14. Downstream Pressure For PARAB
     ************************************************************
      Group 15. Terminate Sweeps
     LSWEEP = 100
     RESFAC =1.0E-03
     ************************************************************
      Group 16. Terminate Iterations
     ************************************************************
      Group 17. Relaxation
     RELAX(P1 ,LINRLX,0.8 )
     RELAX(V1 ,FALSDT,2.0E-03 )
     RELAX(W1 ,FALSDT,2.0E-03 )
     RELAX(S140,FALSDT,1. )
     RELAX(S142,FALSDT,1. )
     RELAX(S145,FALSDT,1. )
     RELAX(S158,FALSDT,1. )
     RELAX(S147,FALSDT,1. )
     RELAX(S80 ,FALSDT,1. )
     RELAX(TEM1,LINRLX,0.3 )
     ************************************************************
      Group 18. Limits
     VARMAX(S116)=1. ;VARMIN(S116)=1.0E-20
     VARMAX(S140)=1. ;VARMIN(S140)=1.0E-20
     VARMAX(S142)=1. ;VARMIN(S142)=1.0E-20
     VARMAX(S145)=1. ;VARMIN(S145)=1.0E-20
     VARMAX(S158)=1. ;VARMIN(S158)=1.0E-20
     VARMAX(S147)=1. ;VARMIN(S147)=1.0E-20
     VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
     VARMAX(TEM1)=2000. ;VARMIN(TEM1)=200.
     ************************************************************
      Group 19. EARTH Calls To GROUND Station
     NAMGRD =CVD
     S2SR = T
     CSG10   ='q1'
     SPEDAT(SET,CVD,MCDOPT,I,2)
     SPEDAT(SET,CVD,BINOPT,I,4)
     SPEDAT(SET,CVD,MCPROP,I,3)
     SPEDAT(SET,CVD,CHMRLX,R,0.5)
     SPEDAT(SET,CVD,NGREAC,I,5)
     SPEDAT(SET,CVD,GREAC(1),I,6)
     SPEDAT(SET,CVD,GREAC(2),I,7)
     SPEDAT(SET,CVD,GREAC(3),I,16)
     SPEDAT(SET,CVD,GREAC(4),I,9)
     SPEDAT(SET,CVD,GREAC(5),I,10)
     SPEDAT(SET,CVD,NSREAC,I,5)
     SPEDAT(SET,CVD,SREAC(1),I,11)
     SPEDAT(SET,CVD,SREAC(2),I,12)
     SPEDAT(SET,CVD,SREAC(3),I,13)
     SPEDAT(SET,CVD,SREAC(4),I,14)
     SPEDAT(SET,CVD,SREAC(5),I,15)
     SPEDAT(SET,CVD,RADCVD,L,T)
     SPEDAT(SET,S2SR,XMIR,L,F)
     SPEDAT(SET,S2SR,YMIR,L,F)
     SPEDAT(SET,S2SR,ZMIR,L,F)
     SPEDAT(SET,S2SR,AXIBFC,L,F)
     SPEDAT(SET,S2SR,FINE3D,L,F)
     SPEDAT(SET,S2SR,VFNORM,L,T)
     SPEDAT(SET,S2SR,NUMRAY,I,1)
     ************************************************************
      Group 20. Preliminary Printout
     ************************************************************
      Group 21. Print-out of Variables
     ************************************************************
      Group 22. Monitor Print-Out
     IXMON = 1 ;IYMON = 5 ;IZMON = 12
     NPRMON = 100000
     NPRMNT = 1
     TSTSWP = -1
     ************************************************************
      Group 23.Field Print-Out & Plot Control
     NPRINT = 100000
     ISWPRF = 1 ;ISWPRL = 100000
       No PATCHes used for this Group
     ************************************************************
      Group 24. Dumps For Restarts
     
     GVIEW(P,-1.,0.,0.)
     GVIEW(UP,0.,1.,0.)
     GVIEW(NEARPLANE,6.8E-04)
     GVIEW(VDIS,0.191823)
     GVIEW(CENTRE,1.049983E-03,0.105,0.17)
     
    > DOM,    SIZE,        1.000000E-02, 2.100000E-01, 3.400000E-01
    > DOM,    MONIT,       0.000000E+00, 4.500000E-02, 1.809232E-01
    > DOM,    SCALE,       1.000000E+00, 1.000000E+00, 1.000000E+00
    > DOM,    INCREMENT,   1.000000E-02, 1.000000E-02, 1.000000E-02
      > GRID,   RSET_X_1,      1, 1.000000E+00
    > GRID,   RSET_Y_1,     10, 1.000000E+00
    > GRID,   RSET_Y_2,      1, 1.000000E+00
    > GRID,   RSET_Y_3,      1, 1.000000E+00
    > GRID,   RSET_Y_4,      2, 1.000000E+00
    > GRID,   RSET_Y_5,      4, 1.000000E+00
    > GRID,   RSET_Z_1,      5, 1.000000E+00
    > GRID,   RSET_Z_2,      2, 1.000000E+00
    > GRID,   RSET_Z_3,     12,-1.200000E+00
    > GRID,   RSET_Z_4,      1, 1.000000E+00
    > GRID,   RSET_Z_5,      6,-9.000000E-01
    > DOM,    T_AMBIENT,   0.000000E+00
     
    > OBJ,    NAME,        WAL1
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 2.350000E-01
    > OBJ,    SIZE,        1.000000E-02, 1.200000E-01, 5.000000E-03
    > OBJ,    GEOMETRY,    polcu7
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    111,STEEL at 27 deg c (C = 1%)
    > OBJ,    FIXED_TMP,   0. ,900.
    > OBJ,    INI_BLOK,    2.
    > OBJ,    SUF_REAC_L,   YES
    > OBJ,    BATCH_F_L,   1.
     
    > OBJ,    NAME,        WAL2
    > OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-02, 1.100000E-01, 1.000000E-01
    > OBJ,    GEOMETRY,    polcu7
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    198,Solid with smooth-wall friction
    > OBJ,    EMISSIV_W,   1.
    > OBJ,    EMISSIV_E,   1.
    > OBJ,    SURF_TEMP_S, 0. ,290.
    > OBJ,    EMISSIV_S,   1.
    > OBJ,    EMISSIV_N,   1.
    > OBJ,    EMISSIV_L,   1.
    > OBJ,    SURF_TEMP_H, 0. ,290.
    > OBJ,    EMISSIV_H,   1.
     
    > OBJ,    NAME,        WAL3
    > OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 1.000000E-01
    > OBJ,    SIZE,        1.000000E-02, 5.000000E-03, 4.000000E-02
    > OBJ,    GEOMETRY,    polcu8
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    111,STEEL at 27 deg c (C = 1%)
    > OBJ,    INI_BLOK,    4.
     
    > OBJ,    NAME,        WAL4
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 2.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 1.550000E-01, 1.000000E-01
    > OBJ,    GEOMETRY,    polcu7
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    198,Solid with smooth-wall friction
    > OBJ,    EMISSIV_W,   1.
    > OBJ,    EMISSIV_E,   1.
    > OBJ,    EMISSIV_S,   1.
    > OBJ,    SURF_TEMP_N, 0. ,290.
    > OBJ,    EMISSIV_N,   1.
    > OBJ,    EMISSIV_L,   1.
    > OBJ,    EMISSIV_H,   1.
     
    > OBJ,    NAME,        INLET
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-02, 1.000000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcu5t
    > OBJ,    TYPE,        INLET
    > OBJ,    DENSITY,     1.572E-03
    > OBJ,    VELOCITY,    0. ,0. ,1.345
    > OBJ,    TEMPERATURE, 290.
    > OBJ,    INLET_S140,  0.113
     
    > OBJ,    NAME,        OUT
    > OBJ,    POSITION,    0.000000E+00, 1.550000E-01, 3.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 5.500000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcubet
    > OBJ,    TYPE,        OUTLET
    > OBJ,    PRESSURE,    0.
    > OBJ,    TEMPERATURE, SAME
    > OBJ,    COEFFICIENT, 1000.
    > OBJ,    VELOCITY,    0. , SAME , SAME
    > OBJ,    OUTLET_S140, SAME
    > OBJ,    OUTLET_S142, SAME
    > OBJ,    OUTLET_S145, SAME
    > OBJ,    OUTLET_S158, SAME
    > OBJ,    OUTLET_S147, SAME
    > OBJ,    OUTLET_S80,  SAME
     
    > OBJ,    NAME,        DOME
    > OBJ,    POSITION,    0.000000E+00, 1.200000E-01, 2.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 3.500000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcu2
    > OBJ,    TYPE,        PLATE
    > OBJ,    POROSITY,    0.
    > OBJ,    SIDE,        LOW
    > OBJ,    SURF_TEMP_L, 0. ,290.
    > OBJ,    EMI_LOW,     1.
     
    > OBJ,    NAME,        WAND2
    > OBJ,    POSITION,    0.000000E+00, 2.100000E-01, 1.000000E-01
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 2.400000E-01
    > OBJ,    GEOMETRY,    polcu2
    > OBJ,    TYPE,        PLATE
    > OBJ,    SURF_TEMP,   0. ,290.
    > OBJ,    EMISSIVITY,  1.
     
    > OBJ,    NAME,        @RI001
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-02, 1.000000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI002
    > OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 1.000000E-01
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI003
    > OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 1.000000E-01
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 4.000000E-02
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  300.
     
    > OBJ,    NAME,        @RI004
    > OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 1.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 5.000000E-03, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  300.
     
    > OBJ,    NAME,        @RI005
    > OBJ,    POSITION,    0.000000E+00, 1.050000E-01, 1.000000E-01
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 4.000000E-02
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  300.
     
    > OBJ,    NAME,        @RI006
    > OBJ,    POSITION,    0.000000E+00, 1.050000E-01, 1.000000E-01
    > OBJ,    SIZE,        1.000000E-02, 1.050000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI007
    > OBJ,    POSITION,    0.000000E+00, 2.100000E-01, 1.000000E-01
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 2.400000E-01
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI008
    > OBJ,    POSITION,    0.000000E+00, 1.550000E-01, 3.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 5.500000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI009
    > OBJ,    POSITION,    0.000000E+00, 1.550000E-01, 2.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 1.000000E-01
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI010
    > OBJ,    POSITION,    0.000000E+00, 1.200000E-01, 2.400000E-01
    > OBJ,    SIZE,        1.000000E-02, 3.500000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   290.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  290.
     
    > OBJ,    NAME,        @RI011
    > OBJ,    POSITION,    0.000000E+00, 1.200000E-01, 2.350000E-01
    > OBJ,    SIZE,        1.000000E-02, 0.000000E+00, 5.000000E-03
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  900.
     
    > OBJ,    NAME,        @RI012
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 2.350000E-01
    > OBJ,    SIZE,        1.000000E-02, 1.200000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  900.
     ************************************************************
    STOP
      

  4. Tungsten Reactor
  5. The tungsten reactor has a showerhead inlet, the details of which are not modelled; instead a uniform inlet is specified. The inlet flow is 6% hydrogen and 94% tungsten hexafluoride by mass, corresponding to approximately 90% hydrogen by volume. Gas-phase chemistry is less important in this case and only a single surface reaction is used in the simulation. The showerhead structure is a very significant part of the problem because of its thermal effect: it is heated radiatively by the hot tungsten susceptor (733K) and in turn passes heat to the gas by convection and to the outer wall by radiation.

    
     TALK=T;RUN( 1, 1)
     
     ************************************************************
       Q1 created by VDI menu, Version 2013, Date 23/03/13
     CPVNAM=VDI;SPPNAM=CVD
     ************************************************************
      Echo DISPLAY / USE settings
      DISPLAY
        This file simulates a simple chemical vapour deposition
        reactor for depositing tungsten; the reactor is axisymmetric
        and the geometry was provided by Siemens.
        Laminar, steady-state flow is assumed.
        The susceptor temperature is 733K.
     
             ------> Y
            |
            |
            | Z
            V
     
             |        OUTLET         |**********************|
            C|                       |**********************|
            E|                       |**********************|
            N|                       |***** BLOCKAGE *******|W
            T|                       |**********************|A
            R|                       |**********************|L
            E|                       |______________________|L
             |                                              |
            L|                                              |
            I|                                              |
            N|                                              |W
            E|                                              |A
             |***************************************|      |L
             |********************** BLOCKAGE *******|      |L
             |***************************************|      |
             |******* INLET *************************|      |
             | |   |   |   |   |   |           |*****|      |W
             | V   V   V   V   V   V           |*****|      |A
             |                                 |*****|      |L
             |                                 |*****|      |L
             |                                 |*****|      |
             |___________________________      |*****|      |
             |****** SUSCEPTOR **********|     |_____|      |
             |***************************|                  |
             |______________________________________________|
                                                FLOOR
     
      ENDDIS
     ************************************************************
     IRUNN = 1 ;LIBREF = 104
     ************************************************************
      Group 1. Run Title
     TEXT(Tungsten Reactor - normal inlet    :D104)
     ************************************************************
      Group 2. Transience
     STEADY = T
     ************************************************************
      Groups 3, 4, 5  Grid Information
        * Overall number of cells, RSET(M,NX,NY,NZ,tolerance)
     RSET(M,1,21,23,7.347739E-05)
        * Cylindrical-polar grid
     CARTES=F
     ************************************************************
      Group 6. Body-Fitted coordinates
     ************************************************************
      Group 7. Variables: STOREd,SOLVEd,NAMEd
        * Non-default variable names
     NAME(16)=S177 ;NAME(17)=S80
     NAME(18)=S97 ;NAME(141)=ENUL
     NAME(142)=BLOK ;NAME(143)=PRPS
     NAME(144)=DEPO ;NAME(145)=SPHT
     NAME(146)=CNDT ;NAME(147)=EMIS
     NAME(148)=VPOR ;NAME(149)=RHO1
     NAME(150) =TEM1
        * Solved variables list
     SOLVE(P1,V1,W1,S80,S97,TEM1)
        * Stored variables list
     STORE(RHO1,VPOR,EMIS,CNDT,SPHT,DEPO,PRPS,BLOK)
     STORE(ENUL,S177)
        * Additional solver options
     SOLUTN(P1,Y,Y,Y,N,N,N)
     SOLUTN(S80,Y,Y,Y,N,N,Y)
     SOLUTN(S97,Y,Y,Y,N,N,Y)
     SOLUTN(TEM1,Y,Y,Y,N,N,Y)
     IVARBK = -1 ;ISOLBK = 1
     
     ************************************************************
      Group 8. Terms & Devices
     DIFCUT =0.
     NEWRH1 = T
     NEWENL = T
     UDIFNE = T
     USOURC = T
     ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
     ************************************************************
      Group 9. Properties
     PRESS0 =133.
        * Domain material index is  70 signifying:
        * NOTSET
     SETPRPS(1, 70,Q1)
     ENUT =0.
     DVO1DT =1.
     PRNDTL(S80)=-GRND8 ;PRNDTL(S97)=-GRND8
     PRNDTL(TEM1)=-GRND8
     PRLH1A =0. ;PRLH1B =0.
     PRLH1C =0.
       *  List of user-defined materials to be read by EARTH
        MATFLG=T;IMAT=2
       *  Name
       *Ind. Dens.  Viscos.  Spec.heat  Conduct.  Expans.  Compr.
       *  >CVD_GAS>
        70 GRND8 GRND8 GRND8 GRND8 1.000 0.000
       *       constants for GRND option no 1
        0. 0.
       *       constants for GRND option no 2
        0. 0.
       *       constants for GRND option no 3
        0. 0.
       *       constants for GRND option no 4
        0. 0.
       *  >USRM2>
        154 1.926E4 1.0 134.0 178.0 0.0 0.0
     ************************************************************
      Group 10.Inter-Phase Transfer Processes
     ************************************************************
      Group 11.Initialise Var/Porosity Fields
     FIINIT(P1)=0. ;FIINIT(V1)=0.
     FIINIT(W1)=0. ;FIINIT(S177)=0.94
     FIINIT(S80)=0.06 ;FIINIT(S97)=1.001E-10
     FIINIT(ENUL)=1.001E-10 ;FIINIT(BLOK)=1.
     FIINIT(PRPS)=-1. ;FIINIT(DEPO)=1.001E-10
     FIINIT(SPHT)=1.001E-10 ;FIINIT(CNDT)=1.001E-10
     FIINIT(EMIS)=0. ;FIINIT(VPOR)=1.
     FIINIT(RHO1)=1.001E-10 ;FIINIT(TEM1)=293.
       No PATCHes used for this Group
     
     
     INIADD = F
     ************************************************************
      Group 12. Convection and diffusion adjustments
       No PATCHes used for this Group
     ************************************************************
      Group 13. Boundary & Special Sources
     
       This patch is attached to object WAFER
     PATCH(WAFER, CELL, -1, 1, 0, 0, 0, 0, 1, 1)
     COVAL(WAFER, TEM1, FIXVAL, 733.)
     
     EGWF = T
     ************************************************************
      Group 14. Downstream Pressure For PARAB
     ************************************************************
      Group 15. Terminate Sweeps
     LSWEEP = 200
     RESFAC =1.0E-06
     ************************************************************
      Group 16. Terminate Iterations
     ************************************************************
      Group 17. Relaxation
     RELAX(P1 ,LINRLX,1. )
     RELAX(V1 ,FALSDT,1000. )
     RELAX(W1 ,FALSDT,1000. )
     RELAX(S80 ,FALSDT,100. )
     RELAX(S97 ,FALSDT,100. )
     RELAX(TEM1,LINRLX,0.7 )
     ************************************************************
      Group 18. Limits
     VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-106.4
     VARMAX(S177)=1. ;VARMIN(S177)=1.0E-20
     VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
     VARMAX(S97)=1. ;VARMIN(S97)=1.0E-20
     VARMAX(TEM1)=1000. ;VARMIN(TEM1)=293.
     ************************************************************
      Group 19. EARTH Calls To GROUND Station
     NAMGRD =CVD
     S2SR = T
     CSG10   ='q1'
     SPEDAT(SET,CVD,MCDOPT,I,2)
     SPEDAT(SET,CVD,BINOPT,I,4)
     SPEDAT(SET,CVD,MCPROP,I,3)
     SPEDAT(SET,CVD,CHMRLX,R,0.5)
     SPEDAT(SET,CVD,NGREAC,I,0)
     SPEDAT(SET,CVD,NSREAC,I,1)
     SPEDAT(SET,CVD,SREAC(1),I,17)
     SPEDAT(SET,CVD,RADCVD,L,T)
     SPEDAT(SET,S2SR,XMIR,L,F)
     SPEDAT(SET,S2SR,YMIR,L,F)
     SPEDAT(SET,S2SR,ZMIR,L,F)
     SPEDAT(SET,S2SR,AXIBFC,L,F)
     SPEDAT(SET,S2SR,FINE3D,L,F)
     SPEDAT(SET,S2SR,VFNORM,L,T)
     SPEDAT(SET,S2SR,NUMRAY,I,1)
     ************************************************************
      Group 20. Preliminary Printout
     ************************************************************
      Group 21. Print-out of Variables
     ************************************************************
      Group 22. Monitor Print-Out
     IXMON = 1 ;IYMON = 12 ;IZMON = 19
     NPRMON = 100000
     NPRMNT = 1
     TSTSWP = -1
     ************************************************************
      Group 23.Field Print-Out & Plot Control
     NPRINT = 100000
     ISWPRF = 1 ;ISWPRL = 100000
       No PATCHes used for this Group
     ************************************************************
      Group 24. Dumps For Restarts
     
     GVIEW(P,-1.,0.,0.)
     GVIEW(UP,0.,1.,0.)
     GVIEW(NEARPLANE,3.37996E-04)
     GVIEW(VDIS,0.110978)
     GVIEW(CENTRE,7.836923E-03,0.0785,0.084499)
     
    > DOM,    SIZE,        1.000000E-01, 1.570000E-01, 1.689980E-01
    > DOM,    MONIT,       0.000000E+00, 1.057500E-01, 1.469985E-01
    > DOM,    SCALE,       1.000000E+00, 1.000000E+00, 1.000000E+00
    > DOM,    INCREMENT,   1.000000E-02, 1.000000E-02, 1.000000E-02
      > GRID,   RSET_X_1,      1, 1.000000E+00
    > GRID,   RSET_Y_1,      7, 1.000000E+00
    > GRID,   RSET_Y_2,      2, 1.000000E+00
    > GRID,   RSET_Y_3,      1, 1.000000E+00
    > GRID,   RSET_Y_4,      1, 1.000000E+00
    > GRID,   RSET_Y_5,      2, 1.000000E+00
    > GRID,   RSET_Y_6,      2, 1.000000E+00
    > GRID,   RSET_Y_7,      2, 1.000000E+00
    > GRID,   RSET_Y_8,      4, 1.000000E+00
    > GRID,   RSET_Z_1,      5, 1.000000E+00
    > GRID,   RSET_Z_2,      1, 1.000000E+00
    > GRID,   RSET_Z_3,      4, 1.000000E+00
    > GRID,   RSET_Z_4,      1, 1.000000E+00
    > GRID,   RSET_Z_5,      2, 1.000000E+00
    > GRID,   RSET_Z_6,      1, 1.000000E+00
    > GRID,   RSET_Z_7,      6, 1.000000E+00
    > GRID,   RSET_Z_8,      1, 1.000000E+00
    > GRID,   RSET_Z_9,      2, 1.000000E+00
    > DOM,    T_AMBIENT,   0.000000E+00
     
    > OBJ,    NAME,        Y1
    > OBJ,    POSITION,    0.000000E+00, 7.000000E-02, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 1.689980E-01
    > OBJ,    GEOMETRY,    wirexyz
    > OBJ,    TYPE,        NULL
     
    > OBJ,    NAME,        Y2
    > OBJ,    POSITION,    0.000000E+00, 8.800000E-02, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 1.689980E-01
    > OBJ,    GEOMETRY,    wirexyz
    > OBJ,    TYPE,        NULL
     
    > OBJ,    NAME,        Z2
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 5.350000E-02
    > OBJ,    SIZE,        1.000000E-01, 1.570000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    wirexyz
    > OBJ,    TYPE,        NULL
     
    > OBJ,    NAME,        Z3
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 9.350000E-02
    > OBJ,    SIZE,        1.000000E-01, 1.570000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    wirexyz
    > OBJ,    TYPE,        NULL
     
    > OBJ,    NAME,        Z5
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.170000E-01
    > OBJ,    SIZE,        1.000000E-01, 1.570000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    wirexyz
    > OBJ,    TYPE,        NULL
     
    > OBJ,    NAME,        BLK1
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.549980E-01
    > OBJ,    SIZE,        1.000000E-01, 1.170000E-01, 1.400000E-02
    > OBJ,    GEOMETRY,    polcu8
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    154,NOTSET
    > OBJ,    INI_BLOK,    2.
    > OBJ,    SUF_REAC_L,   YES
    > OBJ,    BATCH_F_L,   1.
     
    > OBJ,    NAME,        BLK2
    > OBJ,    POSITION,    0.000000E+00, 9.500000E-02, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-01, 6.200000E-02, 5.000000E-02
    > OBJ,    GEOMETRY,    polcu7
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    198,Solid with smooth-wall friction
    > OBJ,    EMISSIV_W,   1.
    > OBJ,    EMISSIV_E,   1.
    > OBJ,    SURF_TEMP_S, 0. ,328.
    > OBJ,    EMISSIV_S,   1.
    > OBJ,    EMISSIV_N,   1.
    > OBJ,    EMISSIV_L,   1.
    > OBJ,    SURF_TEMP_H, 0. ,328.
    > OBJ,    EMISSIV_H,   1.
     
    > OBJ,    NAME,        BLK3
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 9.700000E-02
    > OBJ,    SIZE,        1.000000E-01, 1.470000E-01, 2.600000E-02
    > OBJ,    GEOMETRY,    polcu8
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    111,STEEL at 27 deg c (C = 1%)
    > OBJ,    INI_BLOK,    3.
     
    > OBJ,    NAME,        BLK4
    > OBJ,    POSITION,    0.000000E+00, 1.290000E-01, 1.230000E-01
    > OBJ,    SIZE,        1.000000E-01, 1.800000E-02, 3.599800E-02
    > OBJ,    GEOMETRY,    polcu8
    > OBJ,    TYPE,        BLOCKAGE
    > OBJ,    MATERIAL,    111,STEEL at 27 deg c (C = 1%)
    > OBJ,    INI_BLOK,    3.
     
    > OBJ,    NAME,        INLET
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.230000E-01
    > OBJ,    SIZE,        1.000000E-01, 1.020000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcu5t
    > OBJ,    TYPE,        INLET
    > OBJ,    DENSITY,     1.7E-03
    > OBJ,    VELOCITY,    0. ,0. ,4.035
    > OBJ,    TEMPERATURE, 293.
    > OBJ,    INLET_S80,   0.06
    > OBJ,    OBJECT-SIDE,  HIGH
     
    > OBJ,    NAME,        OUT
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-01, 9.500000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcubet
    > OBJ,    TYPE,        OUTLET
    > OBJ,    PRESSURE,    0.
    > OBJ,    TEMPERATURE, SAME
    > OBJ,    COEFFICIENT, 1000.
    > OBJ,    VELOCITY,    0. , SAME , SAME
    > OBJ,    OUTLET_S80,  SAME
    > OBJ,    OUTLET_S97,  SAME
     
    > OBJ,    NAME,        WAFER
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.549980E-01
    > OBJ,    SIZE,        1.000000E-01, 1.020000E-01, 1.400000E-02
    > OBJ,    GEOMETRY,    poldef
    > OBJ,    TYPE,        CELLTYPE
    > OBJ,    PATCHES,     WAFER
     
    > OBJ,    NAME,        FLOOR
    > OBJ,    POSITION,    0.000000E+00, 1.170000E-01, 1.689980E-01
    > OBJ,    SIZE,        1.000000E-01, 4.000000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcu2
    > OBJ,    TYPE,        PLATE
    > OBJ,    SURF_TEMP,   0. ,328.
    > OBJ,    EMISSIVITY,  1.
     
    > OBJ,    NAME,        WALL
    > OBJ,    POSITION,    0.000000E+00, 1.570000E-01, 5.000000E-02
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 1.189980E-01
    > OBJ,    GEOMETRY,    polcu2
    > OBJ,    TYPE,        PLATE
    > OBJ,    SURF_TEMP,   0. ,328.
    > OBJ,    EMISSIVITY,  1.
     
    > OBJ,    NAME,        @RI001
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.549980E-01
    > OBJ,    SIZE,        1.000000E-01, 1.170000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  154.
    > OBJ,    OPTIC_TEMP,  733.
     
    > OBJ,    NAME,        @RI002
    > OBJ,    POSITION,    0.000000E+00, 1.170000E-01, 1.549980E-01
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 1.400000E-02
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  154.
    > OBJ,    OPTIC_TEMP,  733.
     
    > OBJ,    NAME,        @RI003
    > OBJ,    POSITION,    0.000000E+00, 1.170000E-01, 1.689980E-01
    > OBJ,    SIZE,        1.000000E-01, 4.000000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   328.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  328.
     
    > OBJ,    NAME,        @RI004
    > OBJ,    POSITION,    0.000000E+00, 1.570000E-01, 5.000000E-02
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 1.189980E-01
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   328.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  328.
     
    > OBJ,    NAME,        @RI005
    > OBJ,    POSITION,    0.000000E+00, 9.500000E-02, 5.000000E-02
    > OBJ,    SIZE,        1.000000E-01, 6.200000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   328.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  328.
     
    > OBJ,    NAME,        @RI006
    > OBJ,    POSITION,    0.000000E+00, 9.500000E-02, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 5.000000E-02
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   328.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  328.
     
    > OBJ,    NAME,        @RI007
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 0.000000E+00
    > OBJ,    SIZE,        1.000000E-01, 9.500000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    SURF_TEMP,   300.
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  300.
     
    > OBJ,    NAME,        @RI008
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 9.700000E-02
    > OBJ,    SIZE,        1.000000E-01, 1.470000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  440.
     
    > OBJ,    NAME,        @RI009
    > OBJ,    POSITION,    0.000000E+00, 1.470000E-01, 9.700000E-02
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.199800E-02
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  440.
     
    > OBJ,    NAME,        @RI010
    > OBJ,    POSITION,    0.000000E+00, 1.290000E-01, 1.589980E-01
    > OBJ,    SIZE,        1.000000E-01, 1.800000E-02, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  440.
     
    > OBJ,    NAME,        @RI011
    > OBJ,    POSITION,    0.000000E+00, 1.290000E-01, 1.230000E-01
    > OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 3.599800E-02
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    OBJECT-SIDE,  HIGH
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  440.
     
    > OBJ,    NAME,        @RI012
    > OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.230000E-01
    > OBJ,    SIZE,        1.000000E-01, 1.290000E-01, 0.000000E+00
    > OBJ,    GEOMETRY,    polcusrf
    > OBJ,    TYPE,        RAD_SURF
    > OBJ,    SETTING,      AUTO
    > OBJ,    TEMP_COEF,   GRND1
    > OBJ,    OPTIC_INDX,  111.
    > OBJ,    OPTIC_TEMP,  440.
     ************************************************************
    STOP
      

    </strong></pre></body></html>


  6. Parallel Plate Plasma Reactor

The plasma enhanced reactor is for silicon deposition from pure silane. Three gas-phase and two surface reactions are included, all dependent on the state of the plasma. The gas-phase reaction rates all exhibit dependence on ionization rate while the surface reaction rates all have an Arrhenius formulation, based on surface temperature, multiplied by the ion flux to the surface. (The reactions defined in CHEMIDAT for this simulation are for demonstration purposes only.)


 TALK=T;RUN( 1, 1)
 
 ************************************************************
   Q1 created by VDI menu, Version 2013, Date 23/03/13
 CPVNAM=VDI;SPPNAM=CVD
 ************************************************************
  Echo DISPLAY / USE settings
  DISPLAY
    This case simulates a reactor using a plasma to enhance
    the gas phase chemistry. The reactor is axisymmetric,
    the geometry shown below.
    Laminar, steady-state flow is assumed.
    The susceptor temperature is 533K.
 
      ------> Y
     |
     |
     | Z
     V
 
      |************************************|  INLET  |
      |*********** BLOCKAGE****************|         |
      |____________________________________|         |W
     C|                                              |A
     E|                                              |L
     N|        PLASMA REGION                         |L
     T|                                              |
     R|                                              |
     E|-----------WAFER--------------                |W
      |******************************|               |A
     L|******************************|               |L
     I|******************************|               |L
     N|********* BLOCKAGE ***********|               |
     E|******************************|               |
      |******************************|               |W
      |******************************|               |A
      |******************************|               |L
      |******************************|               |L
      |______________________________|     OUTLET    |
 
 
  ENDDIS
 ************************************************************
 IRUNN = 1 ;LIBREF = 109
 ************************************************************
  Group 1. Run Title
 TEXT(Parallel Plate Plasma Reactor      :D109)
 ************************************************************
  Group 2. Transience
 STEADY = T
 ************************************************************
  Groups 3, 4, 5  Grid Information
    * Overall number of cells, RSET(M,NX,NY,NZ,tolerance)
 RSET(M,1,29,19,1.0E-05)
    * Cylindrical-polar grid
 CARTES=F
 ************************************************************
  Group 6. Body-Fitted coordinates
 ************************************************************
  Group 7. Variables: STOREd,SOLVEd,NAMEd
    * Non-default variable names
 NAME(16)=S140 ;NAME(17)=S142
 NAME(18)=S145 ;NAME(19)=S158
 NAME(20)=S80 ;NAME(136)=SPHT
 NAME(137)=ENUL ;NAME(138)=BLOK
 NAME(139)=PRPS ;NAME(140)=DEPO
 NAME(141)=VPOR ;NAME(142)=RHO1
 NAME(143)=GION ;NAME(144)=GAMM
 NAME(145)=PHIT ;NAME(146)=T0
 NAME(147)=NE ;NAME(148)=PHI2
 NAME(149)=PHI1 ;NAME(150)=TEM1
    * Solved variables list
 SOLVE(P1,V1,W1,S142,S145,S158,S80,T0)
 SOLVE(NE,PHI2,PHI1,TEM1)
    * Stored variables list
 STORE(PHIT,GAMM,GION,RHO1,VPOR,DEPO,PRPS,BLOK)
 STORE(ENUL,SPHT,S140)
    * Additional solver options
 SOLUTN(P1,Y,Y,Y,N,N,N)
 SOLUTN(S142,Y,Y,Y,N,N,Y)
 SOLUTN(S145,Y,Y,Y,N,N,Y)
 SOLUTN(S158,Y,Y,Y,N,N,Y)
 SOLUTN(S80,Y,Y,Y,N,N,Y)
 SOLUTN(T0,Y,Y,Y,N,N,Y)
 SOLUTN(NE,Y,Y,Y,N,N,Y)
 SOLUTN(PHI2,Y,Y,Y,N,N,Y)
 SOLUTN(PHI1,Y,Y,Y,N,N,Y)
 SOLUTN(TEM1,Y,Y,Y,N,N,Y)
 IVARBK = -1 ;ISOLBK = 1
 
 ************************************************************
  Group 8. Terms & Devices
 TERMS (T0  ,N,N,Y,Y,Y,N)
 TERMS (NE  ,N,N,Y,Y,Y,N)
 TERMS (PHI2,N,N,Y,Y,Y,N)
 TERMS (PHI1,N,N,Y,Y,Y,N)
 DIFCUT =0.
 ADDDIF = T
 NEWRH1 = T
 NEWENL = T
 UDIFNE = T
 USOURC = T
 ISOLX = 0 ;ISOLY = 0 ;ISOLZ = 0
 ************************************************************
  Group 9. Properties
 PRESS0 =10.
    * Domain material index is  70 signifying:
    * CVD_GAS
 SETPRPS(1, 70,Q1)
 ENUT =0.
 DVO1DT =1.
 PRNDTL(S142)=-GRND8 ;PRNDTL(S145)=-GRND8
 PRNDTL(S158)=-GRND8 ;PRNDTL(S80)=-GRND8
 PRNDTL(T0)=-GRND7 ;PRNDTL(NE)=-GRND7
 PRNDTL(PHI2)=-GRND7 ;PRNDTL(PHI1)=-GRND7
 PRNDTL(TEM1)=-GRND8
 PRLH1A =0. ;PRLH1B =0.
 PRLH1C =0.
   *  List of user-defined materials to be read by EARTH
    MATFLG=T;IMAT=1
   *  Name
   *Ind. Dens.  Viscos.  Spec.heat  Conduct.  Expans.  Compr.
   *  >CVD_GAS>
    70 GRND8 GRND8 GRND8 GRND8 1.000 0.000
   *       constants for GRND option no 1
    0. 0.
   *       constants for GRND option no 2
    0. 0.
   *       constants for GRND option no 3
    0. 0.
   *       constants for GRND option no 4
    0. 0.
 ************************************************************
  Group 10.Inter-Phase Transfer Processes
 ************************************************************
  Group 11.Initialise Var/Porosity Fields
 FIINIT(P1)=0. ;FIINIT(V1)=0.
 FIINIT(W1)=0. ;FIINIT(S140)=1.
 FIINIT(S142)=1.001E-10 ;FIINIT(S145)=1.001E-10
 FIINIT(S158)=1.001E-10 ;FIINIT(S80)=1.001E-10
 FIINIT(SPHT)=1.001E-10 ;FIINIT(ENUL)=1.001E-10
 FIINIT(BLOK)=1. ;FIINIT(PRPS)=-1.
 FIINIT(DEPO)=1.001E-10 ;FIINIT(VPOR)=1.
 FIINIT(RHO1)=1.001E-10 ;FIINIT(GION)=1.001E-10
 FIINIT(GAMM)=1.001E-10 ;FIINIT(PHIT)=1.001E-10
 FIINIT(T0)=1.1E+04 ;FIINIT(NE)=1.0E-02
 FIINIT(PHI2)=0. ;FIINIT(PHI1)=100.
 FIINIT(TEM1)=300.
   No PATCHes used for this Group
 
 
 INIADD = F
 ************************************************************
  Group 12. Convection and diffusion adjustments
   No PATCHes used for this Group
 ************************************************************
  Group 13. Boundary & Special Sources
 
   This patch is attached to object VIN1
 INLET(VIN1, LOW, -1, 0, 0, 0, 0, 0, 1, 1)
 VALUE(VIN1, P1, 10.)
 VALUE(VIN1, V1, 0.)
 VALUE(VIN1, W1, 0.030376)
 VALUE(VIN1, S140, 1.)
 VALUE(VIN1, S142, 0.)
 VALUE(VIN1, S145, 0.)
 VALUE(VIN1, S158, 0.)
 VALUE(VIN1, S80, 0.)
 VALUE(VIN1, T0, 0.)
 VALUE(VIN1, NE, 0.)
 VALUE(VIN1, PHI2, 0.)
 VALUE(VIN1, PHI1, 0.)
 VALUE(VIN1, TEM1, 300.)
 
 PATCH(COOL, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
 COVAL(COOL, T0, GRND7, GRND7)
 COVAL(COOL, NE, GRND7, GRND7)
 
 PATCH(IONIZE, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
 COVAL(IONIZE, T0, GRND7, GRND7)
 COVAL(IONIZE, NE, GRND7, GRND7)
 
 PATCH(CHEM, VOLUME, 0, 0, 0, 0, 0, 0, 1, 1)
 COVAL(CHEM, S142, GRND1, GRND1)
 COVAL(CHEM, S145, GRND1, GRND1)
 COVAL(CHEM, S158, GRND1, GRND1)
 COVAL(CHEM, S80, GRND1, GRND1)
 COVAL(CHEM, TEM1, GRND1, GRND1)
 
 PATCH(RELT, PHASEM, 0, 0, 0, 0, 0, 0, 1, 1)
 COVAL(RELT, S142, GRND1, SAME)
 COVAL(RELT, S145, GRND1, SAME)
 COVAL(RELT, S158, GRND1, SAME)
 COVAL(RELT, S80, GRND1, SAME)
 
 EGWF = T
 ************************************************************
  Group 14. Downstream Pressure For PARAB
 ************************************************************
  Group 15. Terminate Sweeps
 LSWEEP = 300
 RESFAC =1.0E-03
 ************************************************************
  Group 16. Terminate Iterations
 LITER(S142)=200 ;LITER(S145)=200
 LITER(S158)=200 ;LITER(S80)=200
 ************************************************************
  Group 17. Relaxation
 RELAX(P1 ,LINRLX,0.3 )
 RELAX(V1 ,FALSDT,1.0E-04 )
 RELAX(W1 ,FALSDT,1.0E-04 )
 RELAX(S142,FALSDT,1. )
 RELAX(S145,FALSDT,1. )
 RELAX(S158,FALSDT,1. )
 RELAX(S80 ,FALSDT,1. )
 RELAX(T0 ,FALSDT,1.0E-08 )
 RELAX(NE ,FALSDT,1.0E-08 )
 RELAX(PHI2,FALSDT,1.0E-06 )
 RELAX(PHI1,FALSDT,1.0E-06 )
 RELAX(TEM1,LINRLX,0.3 )
 ************************************************************
  Group 18. Limits
 VARMAX(P1)=1.0E+10 ;VARMIN(P1)=-8.
 VARMAX(S140)=1. ;VARMIN(S140)=1.0E-20
 VARMAX(S142)=1. ;VARMIN(S142)=1.0E-20
 VARMAX(S145)=1. ;VARMIN(S145)=1.0E-20
 VARMAX(S158)=1. ;VARMIN(S158)=1.0E-20
 VARMAX(S80)=1. ;VARMIN(S80)=1.0E-20
 VARMAX(TEM1)=2000. ;VARMIN(TEM1)=260.
 ************************************************************
  Group 19. EARTH Calls To GROUND Station
 NAMGRD =CVD
 CSG10   ='q1'
 SPEDAT(SET,CVD,MCDOPT,I,2)
 SPEDAT(SET,CVD,BINOPT,I,4)
 SPEDAT(SET,CVD,MCPROP,I,3)
 SPEDAT(SET,CVD,CHMRLX,R,1.)
 SPEDAT(SET,CVD,NGREAC,I,3)
 SPEDAT(SET,CVD,GREAC(1),I,18)
 SPEDAT(SET,CVD,GREAC(2),I,21)
 SPEDAT(SET,CVD,GREAC(3),I,22)
 SPEDAT(SET,CVD,NSREAC,I,2)
 SPEDAT(SET,CVD,SREAC(1),I,19)
 SPEDAT(SET,CVD,SREAC(2),I,20)
 SPEDAT(SET,CVD,PHIPAR(1),R,2.)
 SPEDAT(SET,CVD,PHIPAR(2),R,0.8)
 SPEDAT(SET,CVD,PHIPAR(3),R,0.)
 SPEDAT(SET,CVD,PHIPAR(4),R,200.)
 SPEDAT(SET,CVD,NEPAR(1),R,18.)
 SPEDAT(SET,CVD,NEPAR(2),R,5.0E+05)
 SPEDAT(SET,CVD,NEPAR(3),R,3.0E+05)
 SPEDAT(SET,CVD,NEPAR(4),R,1.3E+05)
 SPEDAT(SET,CVD,NEPAR(5),R,0.18)
 SPEDAT(SET,CVD,T0PAR(2),R,0.3)
 SPEDAT(SET,CVD,T0PAR(1),R,3500.)
 SPEDAT(SET,CVD,T0PAR(3),R,6.0E+05)
 SPEDAT(SET,CVD,T0PAR(4),R,1.0E+04)
 SPEDAT(SET,CVD,LNELIM,L,F)
 SPEDAT(SET,CVD,PLASMA,L,T)
 ************************************************************
  Group 20. Preliminary Printout
 ************************************************************
  Group 21. Print-out of Variables
 ************************************************************
  Group 22. Monitor Print-Out
 IXMON = 1 ;IYMON = 1 ;IZMON = 12
 NPRMON = 100000
 NPRMNT = 1
 TSTSWP = -1
 ************************************************************
  Group 23.Field Print-Out & Plot Control
 NPRINT = 100000
 YZPR = T
 ISWPRF = 1 ;ISWPRL = 100000
   No PATCHes used for this Group
 ************************************************************
  Group 24. Dumps For Restarts
 
 GVIEW(P,-0.978781,0.149021,0.140641)
 GVIEW(UP,0.14657,0.988813,-0.027686)
 GVIEW(NEARPLANE,3.26E-04)
 GVIEW(VDIS,0.124332)
 GVIEW(CENTRE,8.136423E-03,0.0815,0.0327)
 
> DOM,    SIZE,        1.000000E-01, 1.630000E-01, 6.540000E-02
> DOM,    MONIT,       0.000000E+00, 2.500000E-03, 2.890000E-02
> DOM,    SCALE,       1.000000E+00, 1.000000E+00, 1.000000E+00
> DOM,    INCREMENT,   1.000000E-02, 1.000000E-02, 1.000000E-02
  > GRID,   RSET_X_1,      1, 1.000000E+00
> GRID,   RSET_Y_1,      4, 1.000000E+00
> GRID,   RSET_Y_2,      9, 1.000000E+00
> GRID,   RSET_Y_3,      2, 1.000000E+00
> GRID,   RSET_Y_4,      1, 1.000000E+00
> GRID,   RSET_Y_5,      1, 1.000000E+00
> GRID,   RSET_Y_6,      1, 1.000000E+00
> GRID,   RSET_Y_7,      1, 1.000000E+00
> GRID,   RSET_Y_8,      1, 1.000000E+00
> GRID,   RSET_Y_9,      4, 1.000000E+00
> GRID,   RSET_Y_10,      3, 1.000000E+00
> GRID,   RSET_Y_11,      1, 1.000000E+00
> GRID,   RSET_Y_12,      1, 1.000000E+00
> GRID,   RSET_Z_1,      1, 1.000000E+00
> GRID,   RSET_Z_2,      2, 1.000000E+00
> GRID,   RSET_Z_3,      7, 1.000000E+00
> GRID,   RSET_Z_4,      2, 1.000000E+00
> GRID,   RSET_Z_5,      2, 1.000000E+00
> GRID,   RSET_Z_6,      4, 1.000000E+00
> GRID,   RSET_Z_7,      1, 1.000000E+00
> DOM,    T_AMBIENT,   0.000000E+00
 
> OBJ,    NAME,        Y1
> OBJ,    POSITION,    0.000000E+00, 2.000000E-02, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y2
> OBJ,    POSITION,    0.000000E+00, 9.200000E-02, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y4
> OBJ,    POSITION,    0.000000E+00, 1.020000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y5
> OBJ,    POSITION,    0.000000E+00, 1.035000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y6
> OBJ,    POSITION,    0.000000E+00, 1.055000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y7
> OBJ,    POSITION,    0.000000E+00, 1.070000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y8
> OBJ,    POSITION,    0.000000E+00, 1.100000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y10
> OBJ,    POSITION,    0.000000E+00, 1.570000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Y11
> OBJ,    POSITION,    0.000000E+00, 1.610000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Z2
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.200000E-02
> OBJ,    SIZE,        1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Z3
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 2.740000E-02
> OBJ,    SIZE,        1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Z5
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 3.460000E-02
> OBJ,    SIZE,        1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        Z6
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 5.540000E-02
> OBJ,    SIZE,        1.000000E-01, 1.630000E-01, 0.000000E+00
> OBJ,    GEOMETRY,    wirexyz
> OBJ,    TYPE,        NULL
 
> OBJ,    NAME,        CMP0
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 1.300000E-01, 1.000000E-02
> OBJ,    GEOMETRY,    polcu7
> OBJ,    TYPE,        BLOCKAGE
> OBJ,    MATERIAL,    198,Solid with smooth-wall friction
> OBJ,    SURF_TEMP_H, 0. ,300.
 
> OBJ,    NAME,        CMP1
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 2.940000E-02
> OBJ,    SIZE,        1.000000E-01, 1.000000E-01, 3.600000E-02
> OBJ,    GEOMETRY,    polcu7
> OBJ,    TYPE,        BLOCKAGE
> OBJ,    MATERIAL,    198,Solid with smooth-wall friction
> OBJ,    LINR_HEAT_L, FIXVAL ,533.
> OBJ,    PLASMA-AC_N, EARTHED
> OBJ,    SUF_REAC_L,   YES
> OBJ,    BATCH_F_L,   1.
> OBJ,    PLASMA-AC_L, EARTHED
 
> OBJ,    NAME,        VIN1
> OBJ,    POSITION,    0.000000E+00, 1.300000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 3.300000E-02, 0.000000E+00
> OBJ,    GEOMETRY,    poldef
> OBJ,    TYPE,        USER_DEFINED
> OBJ,    PATCHES,     VIN1
 
> OBJ,    NAME,        OUTLET
> OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 6.540000E-02
> OBJ,    SIZE,        1.000000E-01, 6.300000E-02, 0.000000E+00
> OBJ,    GEOMETRY,    polcubet
> OBJ,    TYPE,        OUTLET
> OBJ,    PRESSURE,    0.
> OBJ,    TEMPERATURE, SAME
> OBJ,    COEFFICIENT, 1.
> OBJ,    OUTLET_S142, SAME
> OBJ,    OUTLET_S145, SAME
> OBJ,    OUTLET_S158, SAME
> OBJ,    OUTLET_S80,  SAME
 
> OBJ,    NAME,        WALL0
> OBJ,    POSITION,    0.000000E+00, 1.630000E-01, 0.000000E+00
> OBJ,    SIZE,        1.000000E-01, 0.000000E+00, 6.540000E-02
> OBJ,    GEOMETRY,    polcu2
> OBJ,    TYPE,        PLATE
> OBJ,    SURF_TEMP,   0. ,300.
> OBJ,    PLASMA-AC,   EARTHED
 
> OBJ,    NAME,        ELE1BOT
> OBJ,    POSITION,    0.000000E+00, 0.000000E+00, 1.000000E-02
> OBJ,    SIZE,        1.000000E-01, 1.000000E-01, 0.000000E+00
> OBJ,    GEOMETRY,    polcu10
> OBJ,    TYPE,        PLATE
> OBJ,    POROSITY,    0.
> OBJ,    SIDE,        HIGH
> OBJ,    PLASMA-AC_H, ELECTRODE
 
> OBJ,    NAME,        ELRING
> OBJ,    POSITION,    0.000000E+00, 1.000000E-01, 1.000000E-02
> OBJ,    SIZE,        1.000000E-01, 3.000000E-02, 0.000000E+00
> OBJ,    GEOMETRY,    polcu10
> OBJ,    TYPE,        PLATE
> OBJ,    POROSITY,    0.
> OBJ,    SIDE,        HIGH
> OBJ,    PLASMA-AC_H, EARTHED
 ************************************************************
STOP